Micromachined planar spiral inductor in standard GaAs HEMT MMIC technology

IEEE Electron Device Letters

Volumn 19, Issue 8, 1998, Pages 285-287

  Ribas, R P ^b   Lescot, J ^c   Leclercq, J L ^d   Bennouri, N ^b   Karam, J M ^a,b   Courtois, B ^a,b  

^a IEEE

^b TIMA LABORATORY   (France)

^c LEMO Laboratory   (France)

^d ECOLE CENTRALE DE LYON   (France)

Author keywords

Inductor; Micromachining; Microwave; MMIC's

Indexed keywords

CAPACITANCE; HIGH ELECTRON MOBILITY TRANSISTORS; MICROMACHINING; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES;

MICROMACHINED PLANAR SPIRAL INDUCTORS;

ELECTRIC INDUCTORS;

EID: 0032137464     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.704401     Document Type: Article

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