Monolithic micromachined planar spiral transformer

Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)

Volumn , Issue , 1998, Pages 255-258

  Ribas, R P ^a   Lescot, J ^a   Leclercq, J L ^a   Karam, J M ^a   Ndagijimana, F ^a  

^a TIMA LABORATORY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC INDUCTORS; ETCHING; HIGH ELECTRON MOBILITY TRANSISTORS; MICROMACHINING; SEMICONDUCTOR DEVICE STRUCTURES;

MONOLITHIC MICROMACHINED PLANAR SPIRAL TRANSFORMER;

MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;

EID: 0032316427     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)