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Volumn 50, Issue 13, 2002, Pages 3435-3452
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Microstructural evolution in passivated Al films on Si substrates during thermal cycling
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Author keywords
Al; Dislocations; In situ TEM; Plastic deformation; Thin films
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Indexed keywords
ABSORPTION;
ALUMINUM;
DIFFUSION;
DISLOCATIONS (CRYSTALS);
GRAIN GROWTH;
INTERFACES (MATERIALS);
MICROSTRUCTURE;
PASSIVATION;
PLASTIC DEFORMATION;
SILICON;
STRAIN;
SUBSTRATES;
THERMAL CYCLING;
THERMAL EFFECTS;
THERMOMECHANICAL TREATMENT;
TRANSMISSION ELECTRON MICROSCOPY;
THERMAL STRAIN;
METALLIC FILMS;
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EID: 0036681512
PISSN: 13596454
EISSN: None
Source Type: Journal
DOI: 10.1016/S1359-6454(02)00157-X Document Type: Article |
Times cited : (64)
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References (42)
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