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Volumn 50, Issue 7, 2002, Pages 1881-1893
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Size effects on the mechanical properties of thin polycrystalline metal films on substrates
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Author keywords
Dislocations; Mechanical properties; Theory and modeling; Thin films
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Indexed keywords
DISLOCATIONS (CRYSTALS);
GRAIN SIZE AND SHAPE;
MICROSTRUCTURE;
POLYCRYSTALLINE MATERIALS;
SILICON;
STRAIN;
STRAIN HARDENING;
STRESSES;
SUBSTRATES;
THERMAL EFFECTS;
THIN FILMS;
THERMAL EXCURSIONS;
THIN POLYCRYSTALLINE METAL FILMS;
METALLIC FILMS;
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EID: 0037134085
PISSN: 13596454
EISSN: None
Source Type: Journal
DOI: 10.1016/S1359-6454(02)00046-0 Document Type: Article |
Times cited : (67)
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References (28)
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