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Computational Materials Science

Volumn 24, Issue 1-2, 2002, Pages 213-222

Atomistic simulations and the requirements of process simulator for novel semiconductor devices

(5) La Magna, A a Coffa, S b Libertino, S a Strobel, Matthias a,c Colombo, L d

a CNR IMM (Italy)

b STMICROELECTRONICS (Italy)

c UNIVERSITY OF MILAN (Italy)

d UNIVERSITY OF CAGLIARI (Italy)

Author keywords

Kinetic lattice Monte Carlo; Multi scale approaches; Quantum mechanics calculations; Si based device manufacturing processes

Indexed keywords

COMPUTER SIMULATION; MONTE CARLO METHODS; NANOSTRUCTURED MATERIALS; QUANTUM THEORY; SIMULATORS;

ATOMISTIC SIMULATIONS; PROCESS SIMULATOR; SYSTEM KINETICS;

SEMICONDUCTOR DEVICES;

EID: 0036577334 PISSN: 09270256 EISSN: None Source Type: Journal
DOI: 10.1016/S0927-0256(02)00198-2 Document Type: Conference Paper

Times cited : (5)

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