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Volumn 72, Issue 1-4, 2002, Pages 299-313
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Mechanisms and computer modelling of transition element gettering in silicon
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Author keywords
Injection induced gettering; PDG; Segregation; Solar cells; Transition metals
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Indexed keywords
COMPUTER SIMULATION;
DIFFUSION;
GETTERS;
GLASS;
GOLD;
PHOSPHORUS;
SEMICONDUCTOR DOPING;
SOLUBILITY;
SUPERSATURATION;
TRANSITION METALS;
PHOSPHORUS DIFFUSION GETTERING (PDG);
SEMICONDUCTING SILICON;
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EID: 0036533378
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0927-0248(01)00178-7 Document Type: Conference Paper |
Times cited : (20)
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References (34)
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