High concentration diffusivity and clustering of arsenic and phosphorus in silicon

Journal of Applied Physics

Volumn 83, Issue 5, 1998, Pages 2484-2490

  Solmi, S ^a   Nobili, D ^b  

^a CNR   (Italy)

^b UNIVERSITY OF BOLOGNA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000725857     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367008     Document Type: Article

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