Phosphorus diffusion gettering of platinum in silicon: Formation of near-surface precipitates

Physica Status Solidi (B) Basic Research

Volumn 222, Issue 1, 2000, Pages 327-336

  Seibt, M ^a   Doller A ^a   Kveder, V ^a   Sattler, A ^a   Zozime, A ^b  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

^b UNIVERSITÉ D EVRY VAL D ESSONNE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0034336240     PISSN: 03701972     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3951(200011)222:1<327::AID-PSSB327>3.0.CO;2-U     Document Type: Article

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