Metal impurity precipitates in silicon: Chemical state and stability

Physica B: Condensed Matter

Volumn 273-274, Issue , 1999, Pages 371-374

  McHugo, Scott A ^a   Thompson, A C ^a   Lamble, G ^a   Flink, C ^a   Weber, E R ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); FLUORESCENCE; IMPURITIES; PRECIPITATION (CHEMICAL);

X-RAY FLUORESCENCE;

SEMICONDUCTING SILICON;

EID: 0033342295     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(99)00480-9     Document Type: Article

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