SCOPUS 정보 검색 플랫폼

Volumn 17, Issue 3, 2002, Pages 521-524

Synthesis of superhard and elastic carbon nitride films by filtered cathodic vacuum arc combined with radio frequency ion beam source

(9) Cheng, Y H a Tay, B K a Lau, S P a Shi, X a Qiao, X L b Chen, J G b Wu, Y P b Sun, Z H b Xie, C S b

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY (China)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; BUCKLING; CARBON NITRIDE; CHEMICAL BONDS; CROSSLINKING; ELASTIC MODULI; ELASTICITY; HARDNESS; INDENTATION; ION BEAMS; ION BOMBARDMENT; SYNTHESIS (CHEMICAL); VACUUM APPLICATIONS;

FILTERED CATHODIC VACUUM ARC (FCVA) DEPOSITION;

THIN FILMS;

EID: 0036507254 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2002.0072 Document Type: Article

Times cited : (22)

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