Surface hardness enhancement in ion-implanted amorphous carbon

Journal of Applied Physics

Volumn 80, Issue 3, 1996, Pages 1480-1484

  Lee, D H ^a   Park, B ^a   Poker, D B ^b   Riester, L ^b   Feng, Z C ^c,e   Baglin, J E E ^d  

^a Georgia Institute of Technology   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^d IBM ALMADEN RESEARCH CENTER   (United States)

^e EMCORE CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000427292     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363017     Document Type: Article

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