Deposition of (Ti, Al)N films by filtered cathodic vacuum arc

Thin Solid Films

Volumn 379, Issue 1-2, 2000, Pages 76-82

  Cheng, Y H ^a   Tay, B K ^a   Lau, S P ^a   Shi, X ^a   Chua, H C ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b Image Transforms Pte Ltd   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPOSITION EFFECTS; DEPOSITION; ELASTIC MODULI; HARDNESS; RESIDUAL STRESSES; SUBSTRATES; SURFACE ROUGHNESS; TITANIUM COMPOUNDS; VACUUM APPLICATIONS; X RAY DIFFRACTION ANALYSIS;

CATHODIC VACUUM ARC METHODS;

PROTECTIVE COATINGS;

EID: 0034496860     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01397-3     Document Type: Article

References (26)

1. Anderbouhr S., Ghetta V., Blanquet E. Surf. Coat. Technol. 115:1999;103.
2. Zhou M., Makino Y., Nose M. Thin Solid Films. 339:1999;203.
3. Inoue S., Uchida H., Yoshinaga Y. Thin Solid Films. 300:1997;171.
4. Wang D.-Y., Li Y.-W., Chang C.-L. Surf. Coat. Technol. 114:1999;109.
5. Suzuki A. Jpn. J. Appl. Phys. 37:1998;2656.
6. Suzuki T., Huang D., Ikuhara Y. Surf. Coat. Technol. 107:1998;41.
7. He X.-M., Shu L., Xie Z.W. J. Vac. Sci. Technol. B. 17:1999;854.
8. Setsuhara Y., Suzuki T., Makino Y. Surf. Coat. Technol. 97:1997;254.
9. Munz W.D., Hurkmans T., Keiren G. J. Vac. Sci. Technol. A. 11:1993;2583.
10. Lee S.H., Kim B.J., Kim H.H. J. Appl. Phys. 80:1996;1469.
11. Zhou M., Makino Y., Nose M. Thin Solid Films. 339:1999;203.
12. Kim B.-J., Kim Y.-C., Lee J.-J. Surf. Coat. Technol. 114:1999;85.
13. Boxman R.L., Sanders D.M., Martin P.J. Handbook of Vacuum Arc Science and Technology: Fundamentals and Applications. 1995;Noyes, Park Ridge, NJ.
14. Tay B.K., Shi X., Yang H.S. Surf. Coat. Technol. 111:1999;229.
15. Xu S., Flynn D., Tay B.K. Phil. Mag. B. 76:1997;351.
16. Tay B.K., Shi X., Flynn D.I. Surf. Eng. 13:1997;213.
17. Oliver W.C., Pharr G.M. J. Mater. Res. 17:1992;1564.
18. Meyer K., Schuller I.K., Falco C.M. J. Appl. Phys. 52:1981;5803.
19. Adibi F., Petrov I., Greene J.E. J. Appl. Phys. 73:1993;8580.
20. Kimura A., Hasegawa H., Yamada K. Surf. Coat. Technol. 120-121:1999;438.
21. Huffman G.L., Fahnline D.E., Messier R. J. Vac. Sci. Technol. A. 7:1989;2252.
22. Cheng Y.H., Wu Y.P., Chen J.G. Diamond Relat. Mater. 7:1999;1214.
23. Inoue S., Ohba T., Takata H. Thin Solid Films. 343/344:1999;230.
24. Davis C.A. Thin Solid Films. 226:1993;30.
25. Tay B.K., Shi X., Flynn D.I., Sun Z. Surf. Eng. 13:1997;213.
26. Jimenez C., Sanchez-Fernandez C., Morant C. J. Mater. Res. 14:1999;2830.