Cantilever with integrated Wheatstone bridge piezoresistive deflection sensor: analysis of force interaction measurement sensitivity

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2880, Issue , 1996, Pages 264-271

  Gotszalk, Teodor ^a   Rangelow, Ivo W ^a   Dumania, Piotr ^a   Grabiec, Piotr B ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

BEAMS AND GIRDERS; ELASTICITY; ELECTRIC MEASURING BRIDGES; FRICTION; MICROSCOPY; SPURIOUS SIGNAL NOISE; SURFACES; TRIBOLOGY;

ATOMIC FORCE MICROSCOPY; PIEZORESISTIVE DEFLECTION; WHEATSTONE BRIDGES;

OPTICAL SENSORS;

EID: 0030381037     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.250959     Document Type: Conference Paper

References (10)