Fabrication of multipurpose AFM/SCM/SEP microprobe with integrated piezoresistive deflection sensor and isolated conductive tip

Microelectronic Engineering

Volumn 41-42, Issue , 1998, Pages 477-480

  Gotszalk, T ^a   Grabiec, P ^c   Shi, F ^b   Dumania, P ^c   Hudek, P ^d   Rangelow, I W ^b  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b UNIVERSITY OF KASSEL   (Germany)

^c Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

^d INSTITUTE OF CHEMISTRY   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; INTEGRATED CIRCUITS; MICROELECTRONICS; PIEZOELECTRIC TRANSDUCERS; SENSORS; SURFACE ROUGHNESS;

SCANNING MICROPROBE;

PROBES;

EID: 0031677670     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00111-7     Document Type: Article

References (3)

1. P.B. Grabiec, Feng Shi, P.Hudek, T.Gotszalk, M.Zaborowski, P.Dumania, I.W.Rangelow, Scanning Probe Sharp Tip Formation for IC Integration using MESA Technique, Abstracts of the Micro- and Nano- Engineering '96 Conference MNE '96, Sept. 22-25, 1996, Glasgow, Scotland, p. 199.
2. I. W. Rangelow, Microelectronic Eng., 23 (1994) 369.
3. T. Gotszalk, I. Rangelow, P. Dumania, P. Grabiec, Cantilever with integrated Wheatstone bridge piezoresistive deflection sensor - analysis of force interaction measurement sensitivity, Proc. SPIE 2880, 263, (1996).