Lateral force microscopy using cantilevers with integrated Wheatstone bridge piezoresistive deflection sensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2880, Issue , 1996, Pages 256-263

  Gotszalk, Teodor ^a   Rangelow, Ivo W ^a   Dumania, Piotr ^a   Grabiec, Piotr B ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

BEAMS AND GIRDERS; CHROMIUM; ELECTRIC MEASURING BRIDGES; FRICTION; OPTICAL SENSORS; QUARTZ; SURFACES;

CANTILEVERS; LATERAL FORCE MICROSCOPY; PIEZORESISTIVE DEFLECTION SENSORS; WHEATSTONE BRIDGE;

MICROSCOPY;

EID: 0030378931     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.250958     Document Type: Conference Paper

References (12)