AFM with piezoresistive Wheatstone bridge cantilever: noise performance and applications in contact and noncontact mode

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2780, Issue , 1996, Pages 376-379

  Gotszalk, Teodor ^a   Linnemann, R ^a   Rangelow, Iwilo W ^a   Dumania, Piotr ^a   Grabiec, Piotr B ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

DETECTORS; MICROSCOPES; PIEZOELECTRIC DEVICES; SENSORS; SPURIOUS SIGNAL NOISE; SURFACE ROUGHNESS;

ATOMIC FORCE MICROSCOPES; CANTILEVER DEFLECTION; DEFLECTION SENSORS; TOPOGRAPHY MEASUREMENT; WHEATSTONE PIEZORESISTIVE BRIDGES;

ATOMIC FORCE MICROSCOPY;

EID: 0029722773     PISSN: 0277786X     EISSN: None     Source Type: None    
DOI: 10.1117/12.238192     Document Type: Conference Paper

References (7)