Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 856-860

  Linnemann, R ^a   Gotszalk, T ^a   Rangelow, I W ^a   Dumania, P ^a   Oesterschulze, E ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5544219738     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589161     Document Type: Article

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