Two-dimensional dopant profiling of very large scale integrated devices using selective etching and atomic force microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 447-451

  Barrett, M ^a,b   Dennis, M ^a   Tiffin, D ^a   Li, Y ^a   Shih, C K ^b  

^a ADVANCED MICRO DEVICES   (United States)

^b UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001191165     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588492     Document Type: Article

References (13)

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