Application of piezoresistive Wheatstone bridge cantilever in advanced atomic force microscopy techniques

International Journal of Electronics

Volumn 81, Issue 4, 1996, Pages 473-483

  Gotszalk, T ^a   Linnemann, R ^b   Rangelow, I W ^b   Garbiec, P ^c   Dumania, P ^c  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b UNIVERSITY OF KASSEL   (Germany)

^c ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; MECHANICAL PROPERTIES; SURFACE PROPERTIES; SURFACE STRUCTURE; SURFACES;

LATERAL FORCES; PIEZORESISTIVE WHEATSTONE BRIDGE CANTILEVER; TOPOGRAPHY;

BRIDGE CIRCUITS;

EID: 0030261835     PISSN: 00207217     EISSN: 13623060     Source Type: Journal    
DOI: 10.1080/002072196136652     Document Type: Article

References (10)

1. Binnig, G., Quate, C. F., and Gerber, Ch., 1986, Atomic force microscope. Physical Review Letters, 56, 930.
2. Goedenhenrich, T., Muller, S., and Heiden, C., 1994, Lateral modulation technique for simultaneous friction and topography measurements with the atomic force microscope. Review of Scientific Instruments, 65, 2870.
3. Linnemann, R., Gotszalk, T., Hadjiiski, L., and Rangelow, I. W., 1995, Characterization of cantilever with integrated deflection sensor. Thin Solid Films, 264, 159-164.
4. Martin, Y., Wiliams, C. C., and Wickramasinghe, H. K. 1987, Atomic force microscope -force mapping and profiling on sub 100A scale, Journal of Applied Physics, 61, 4723.
5. Mathew, C., McClelland, Gary M., Erlandsson, R., and Chiang, S., 1987, Atomic-scale friction of a tungsten tip on graphite surface. Physical Review Letters, 59, 1942.
6. Meyer, G., and Amer, N. M., 1988, Novel optical approach to atomic force microscopy. Applied Physics Letters, 53, 1045.
7. Rangelow, I. W., Skocki, S., and Dumania, P., 1994, Plasma etching for micromechanical sensor applications. Microelectronic Engineering, 23, 365.
8. Rugar, D., Mamin, H. J., and Guethner, P., 1989 Improved fiber-optic interferometer for atomic force microscopy. Applied Physics Letters, 55, 2588.
9. Tortonese, M., Barett, R. C., and Quate, C. F., 1993, Atomic resolution with Atomic Force Microscope using piezoresistive detection. Applied Physics Letters, 62, 83.
10. Tortonese, M., Yamada, H., Barett, R. C., and Quate, C. F., 1991, Atomic Force Microscopy using a piezoresistive Cantilever. IEEE, 91CH2817-5, New York, p. 448