Local electric-field-induced oxidation of titanium nitride films

Applied Physics Letters

Volumn 74, Issue 8, 1999, Pages 1090-1092

  Gwo, S ^a   Yeh, C L ^a   Chen, P F ^a   Chou, Y C ^a   Chen, T T ^a   Chao, T S ^b   Hu, S F ^b   Huang, T Y ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000379348     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123491     Document Type: Article

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