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Surface and Coatings Technology

Volumn 79, Issue 1-3, 1996, Pages 76-86

Amorphous diamond film by enhanced arc deposition

(2) Coll, Bernard F a,b Chhowalla, Manish a,c

a Multi Arc Inc (United States)

b Phoenix Corporation Research Laboratories (United States)

c UNIVERSITY OF CAMBRIDGE (United Kingdom)

Author keywords

Amorphous diamond; Arc evaporation; Non hydrogenated carbon films

Indexed keywords

COATINGS-DIAMOND; DEPOSITION; DIAMONDS; ENHANCED ARC;

AMORPHOUS MATERIALS; CARBON; CONDENSATION; DEPOSITION; ELASTIC MODULI; EVAPORATION; HARDNESS; MICROSTRUCTURE; SILICON; SUBSTRATES;

AMORPHOUS DIAMOND FILMS; CATHODIC ARC; ENHANCED ARC DEPOSITION; HIGH SPEED STEEL; NON HYDROGENATED CARBON FILMS; NONINDENTATION TECHNIQUE; PHYSICAL VAPOR DEPOSITION PROCESS; SCRATCH TEST MEASUREMENT;

DIAMOND FILMS;

EID: 0030072078 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/0257-8972(95)02444-1 Document Type: Article

Times cited : (37)

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