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Thin Solid Films

Volumn 343-344, Issue 1-2, 1999, Pages 222-225

Hard a-C:H films deposited at high deposition rates

(4) Marques, F C a Lacerda, R G a De Lima Jr , M M a Vilcarromero, J a

a UNIVERSITY OF CAMPINAS (Brazil)

Author keywords

Deposition rate; Diamond like carbon; Stress, Hardness

Indexed keywords

BAND STRUCTURE; CARBON; CATHODES; FILM PREPARATION; HARDNESS; HYDROGENATION; PROTECTIVE COATINGS; RAMAN SCATTERING; SPUTTER DEPOSITION; STRESS ANALYSIS;

DIAMOND LIKE CARBON; HARD-HYDROGENATED AMORPHOUS CARBON FILMS;

AMORPHOUS FILMS;

EID: 0032650292 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(98)01630-7 Document Type: Article

Times cited : (8)

References (18)

1
- 0346974565
- J. Robertson, Prog. Solid St. Chem, 21 (1991) 199.
- (1991) Prog. Solid St. Chem , vol.21 , pp. 199
- Robertson, J.¹

2
- 0002272533
- S. Neuville, A. Matthews, MRS Bulletin 22 (1997) 22.
- (1997) MRS Bulletin , vol.22 , pp. 22
- Neuville, S.¹ Matthews, A.²

3
- 0000696411
- R.G. Lacerda, F.C. Marques, Appl. Phys. Lett. 73 (5) (1998) 617.
- (1998) Appl. Phys. Lett. , vol.73 , Issue.5 , pp. 617
- Lacerda, R.G.¹ Marques, F.C.²

4
- 0032476354
- F.C. Marques, R.G. Lacerda, G.Y. Odo, CM. Lepienski, Thin Solid Films 332 (1998) 113.
- (1998) Thin Solid Films , vol.332 , pp. 113
- Marques, F.C.¹ Lacerda, R.G.² Odo, G.Y.³ Lepienski, C.M.⁴

5
- 0003312415
- Mechanical Properties of Thin Films Cap. 12th
- L.I. Maissel, R. Glang (Eds.), McGraw-Hill, New York
- D.S. Campbell, Mechanical Properties of Thin Films Cap. 12th. in: L.I. Maissel, R. Glang (Eds.), Handbook of Thin Film Technology, McGraw-Hill, New York, 1970.
- (1970) Handbook of Thin Film Technology
- Campbell, D.S.¹

6
- 21544470982
- D.F. Franceschini, C.A. Achete, F.L. Freire Jr., Appl. Phys. Lett. 60 (1992) 3229.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 3229
- Franceschini, D.F.¹ Achete, C.A.² Freire Jr., F.L.³

7
- 0024055560
- K. Yamamoto, Y. Ichikawa, T. Nakayawa, Y. Tawada, Jpn. J. Appl. Phys. 27 (1988) 1415.
- (1988) Jpn. J. Appl. Phys. , vol.27 , pp. 1415
- Yamamoto, K.¹ Ichikawa, Y.² Nakayawa, T.³ Tawada, Y.⁴

8
- 36549103692
- X. Jiang, K. Reichelt, B. Stritzker, J. Appl. Phys. 66 (12) (1989) 5805.
- (1989) J. Appl. Phys. , vol.66 , Issue.12 , pp. 5805
- Jiang, X.¹ Reichelt, K.² Stritzker, B.³

9
- 36549097055
- J.W. Zou, K. Reichelt, K. Schmidt, B. Dischler, J. Appl. Phys. 65 (10) (1989) 3915.
- (1989) J. Appl. Phys. , vol.65 , Issue.10 , pp. 3915
- Zou, J.W.¹ Reichelt, K.² Schmidt, K.³ Dischler, B.⁴

10
- 0022810595
- Y. Catherine, P. Couderc, Thin Solid Films 144 (1986) 265.
- (1986) Thin Solid Films , vol.144 , pp. 265
- Catherine, Y.¹ Couderc, P.²

11
- 0009616922
- X. Jiang, K. Reichelt, B. Stritzker, J. Appl. Phys. 66 (1989) 1018.
- (1989) J. Appl. Phys. , vol.66 , pp. 1018
- Jiang, X.¹ Reichelt, K.² Stritzker, B.³

12
- 0000630514
- J. Schwan, S. Ulrich, K. Jung, H. Ehrhardt, R. Samlenski, R. Brenn, Diamond Related Mater. 4 (1995) 304.
- (1995) Diamond Related Mater. , vol.4 , pp. 304
- Schwan, J.¹ Ulrich, S.² Jung, K.³ Ehrhardt, H.⁴ Samlenski, R.⁵ Brenn, R.⁶

13
- 0000123706
- J. Robertson, J. Non-Cryst. Solids 198 (1996) 614.
- (1996) J. Non-Cryst. Solids , vol.198 , pp. 614
- Robertson, J.¹

14
- 0000731124
- J. Robertson, Diamond Related Mater. 6 (1997) 212.
- (1997) Diamond Related Mater. , vol.6 , pp. 212
- Robertson, J.¹

15
- 0000879286
- P.J. Fallon, V.S. Veerasamy, C.A. Davis, J. Robertson, G.A.J. Amaratunga, W.I. Milne, J. Koskinen, Phys. Rev. B 48 (1993) 4777.
- (1993) Phys. Rev. B , vol.48 , pp. 4777
- Fallon, P.J.¹ Veerasamy, V.S.² Davis, C.A.³ Robertson, J.⁴ Amaratunga, G.A.J.⁵ Milne, W.I.⁶ Koskinen, J.⁷

16
- 0001181304
- J. Schwan, S. Ulrich, V. Batori, H. Ehrhardt, S.R.P. Silva, J. Appl. Phys. 80 (1996) 440.
- (1996) J. Appl. Phys. , vol.80 , pp. 440
- Schwan, J.¹ Ulrich, S.² Batori, V.³ Ehrhardt, H.⁴ Silva, S.R.P.⁵

17
- 0039690421
- M. Tamor, W. Vassel, J. Appl. Phys. 76 (1994) 446.
- (1994) J. Appl. Phys. , vol.76 , pp. 446
- Tamor, M.¹ Vassel, W.²

18
- 0001510029
- S. Prawer, K.W. Nugeat, Y. Lifshitz, G.D. Lampert, E. Grossman, J. Kulik, R, Kalish, Diamond Related Mater. 5 (1996) 433.
- (1996) Diamond Related Mater. , vol.5 , pp. 433
- Prawer, S.¹ Nugeat, K.W.² Lifshitz, Y.³ Lampert, G.D.⁴ Grossman, E.⁵ Kulik, J.⁶ Kalish, R.⁷

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