Dependence of carbon interatomic bonds on incident ion energy in carbon negative ion beam deposited films

Thin Solid Films

Volumn 343-344, Issue 1-2, 1999, Pages 17-20

  Tsuji, Hiroshi ^a   Nakamura, Shuichi ^a   Gotoh, Yasuhito ^a   Ishikawa, Junzo ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Atomic bonds; Diamondlike carbon films; Ion beam deposition; Negative ion beam

Indexed keywords

EID: 4243254144     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01561-2     Document Type: Article

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