Optical properties of carbon and carbon nitride films prepared by mass-separated energetic negative carbon and carbon nitrogen ions

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 2384-2388

  Tsubouchi, Nobuteru ^a   Enders, Burkhard ^b   Chayahara, Akiyoshi ^a   Kinomura, Atsushi ^a   Heck, Claire ^a   Horino, Yuji ^a  

^a OSAKA NATIONAL RESEARCH INSTITUTE   (Japan)

^b PHILIPPS UNIVERSITY MARBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

A-C FILM; AMORPHOUS CARBON (A-C); ARRIVAL RATIO; CARBON NITRIDE FILMS; CHEMICAL COMPOSITIONS; CN FILM; COMPOSITION RATIO; ION BEAM DEPOSITION; KINETIC ENERGY DEPENDENCE; NITROGEN IONS; ULTRAHIGH VACUUM CONDITIONS;

AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON NITRIDE; CHEMICAL MODIFICATION; ELECTRON ENERGY LOSS SPECTROSCOPY; FILM PREPARATION; IONS; KINETIC ENERGY; OPTICAL CONSTANTS; OPTICAL PROPERTIES;

CARBON FILMS;

EID: 0000039772     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581776     Document Type: Conference Paper

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