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Volumn 137, Issue 2-3, 2001, Pages 152-157
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Field emission properties of two-layer structured SiCN films
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Author keywords
Electron emission; Nanocrystalline; SiCN; Two layer structure
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Indexed keywords
ELECTRON EMISSION;
NANOSTRUCTURED MATERIALS;
RAMAN SPECTROSCOPY;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
X RAY PHOTOELECTRON SPECTROSCOPY;
SILICON CARBON NITRIDE FILMS;
SEMICONDUCTING FILMS;
DIAMOND-LIKE CARBON;
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EID: 0035868340
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(00)01072-0 Document Type: Article |
Times cited : (32)
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References (34)
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