Anisotropies in magnetron sputtered carbon nitride thin films

Applied Physics Letters

Volumn 78, Issue 18, 2001, Pages 2703-2705

  Hellgren, Niklas ^a,b   Johansson, Mats P ^a,c   Broitman, Esteban ^a   Hultman, Lars ^a   Sundgren, Jan Eric ^a,d  

^a LINKÖPING UNIVERSITY   (Sweden)

^b University of Illinois at Urbana Champaign   (United States)

^c Thin Film Electronics AB   (Sweden)

^d CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035971767     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1369388     Document Type: Article

References (12)

1. 1 films are today commercially used, e.g., as protective overcoats on magnetic disks (for instance by IBM and Western Digital, USA), and as wear protective coatings on special tools (e.g., by Impact Coatings AB, Sweden).
2. For a recent review, see S. Muhl and J. M. Méndez, Diamond Relat. Mater. 8, 1809 (1999).
3. N. Hellgren, M. P. Johansson, E. Broitman, L. Hultman, and J.-E. Sundgren, Phys. Rev. B 59, 5162 (1999).
4. N. Hellgren, M. P. Johansson, E. Broitman, P. Sandström, L. Hultman, and J.-E. Sundgren, Thin Solid Films 382, 146 (2001).
5. W. C. Oliver and G. M. Pharr, J. Mater. Res. 7, 1564 (1992).
6. D. Schneider and T. Schwarz, Thin Solid Films 91, 136 (1997).
7. M. C. dos Santos and F. Alvarez, Phys. Rev. B 58, 13918 (1998).
8. H. Sjöström, S. Stafström, M. Boman, and J.-E. Sundgren, Phys. Rev. Lett. 75, 1336 (1995).
9. E. H. Yoffe, Philos. Mag. A 46, 617 (1982).
10. D. Schneider, B. Schultrich, H.-J. Scheibe, H. Ziegele, and M. Griepentrog, Thin Solid Films 332, 157 (1998).
11. O. L. Blakslee, D. G. Proctor, E. J. Selden, G. B. Spence, and T. Weng, J. Appl. Phys. 41, 8 (1970).
12. S. V. Hainsworth, H. Sjöström, T. F. Page, and J.-E. Sundgren, Mater. Res. Soc. Symp. Proc. 436, 275 (1997).