Synthesis of nanocrystalline diamond thin films from an Ar-CH4 microwave plasma

Journal of Applied Physics

Volumn 83, Issue 1, 1998, Pages 540-543

  Zhou, D ^a,b   McCauley, T G ^a   Qin, L C ^a   Krauss, A R ^a   Gruen, D M ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b University of Central Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000987744     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366668     Document Type: Article

References (22)

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