Temperature dependence of the growth rate for nanocrystalline diamond films deposited from an Ar/CH4 microwave plasma

Applied Physics Letters

Volumn 73, Issue 12, 1998, Pages 1646-1648

  McCauley, Thomas G ^a   Gruen, Dieter M ^a   Krauss, Alan R ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001648827     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122233     Document Type: Article

References (21)

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