The sp3 bond fraction in carbon films prepared by mass-separated ion beam deposition

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 895-899

  Yamamoto, Kazuhiro ^a   Watanabe, Toshiya ^a   Wazumi, Koichiro ^a   Kokai, Fumio ^a   Koga, Yoshinori ^a   Fujiwara, Shuzo ^a  

^a NATL INST OF MAT AND CHEM RES   (Japan)

Author keywords

Diamond like carbon; Electron energy loss spectroscopy (EELS); Mass separeted ion beam deposition (MSIBD); sp3 bonding

Indexed keywords

CARBON; DEGRADATION; ELECTRON ENERGY LOSS SPECTROSCOPY; ION BEAM ASSISTED DEPOSITION;

ION ENERGY;

AMORPHOUS FILMS;

DIAMOND-LIKE CARBON;

EID: 0035269263     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00583-5     Document Type: Article

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