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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 5, 2001, Pages 2522-2532

Characterization of inductively coupled plasma etched surface of GaN using Cl2/BCl3 chemistry

(5) Tripathy, S a Ramam, A b Chua, S J b Pan, J S b Huan, Alfred b

a NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DRY ETCHING; GALLIUM NITRIDE; PHOTOLUMINESCENCE; PLASMA ETCHING; SURFACES; X RAY PHOTOELECTRON SPECTROSCOPY;

BAND EDGE; PLASMA CONDITIONS;

INDUCTIVELY COUPLED PLASMA;

EID: 0035441850 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1392400 Document Type: Article

Times cited : (60)

References (41)

1
- 0028368821
- (1994) Appl. Phys. Lett. , vol.64 , pp. 887
- Lin, M.E.¹ Fan, Z.F.² Ma, Z.³ Allen, L.H.⁴ Morkoc, H.⁵

2
- 0000749547
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 1011
- Vartuli, C.B.¹ Pearton, S.J.² Abernathy, C.R.³ Shul, R.J.⁴ Howard, A.J.⁵ Kilcoyne, S.P.⁶ Parmeter, J.E.⁷ Crawford, M.H.⁸

3
- 0000731993
- (1994) J. Appl. Phys. , vol.76 , pp. 1210
- Pearton, S.J.¹ Abernathy, C.R.² Ren, F.³ Lothian, J.R.⁴

4
- 0028527026
- (1994) Electron. Lett. , vol.30 , pp. 1895
- Ping, A.T.¹ Adesida, I.² Asif Khan, M.³ Kuzina, J.N.⁴

5
- 0000498880
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1754
- Lee, H.¹ Oberman, D.B.² Harris J.S., Jr.³

6
- 0001613730
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 1046
- McLane, G.F.¹ Monahan, T.² Eckart, D.W.³ Pearton, S.J.⁴ Abernathy, C.R.⁵

7
- 36449001822
- (1995) Appl. Phys. Lett. , vol.66 , pp. 3328
- McLane, G.F.¹ Casas, L.² Pearton, S.J.³ Abernathy, C.R.⁴

8
- 75149162860
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 1631
- Cho, H.¹ Vartuli, C.B.² Donovan, S.M.³ Abernathy, C.R.⁴ Pearton, S.J.⁵ Shul, R.J.⁶ Constantine, C.⁷

9
- 0003221467
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 638
- Vartuli, C.B.¹ Pearton, S.J.² Lee, J.W.³ McKenzie, J.D.⁴ Abernathy, C.R.⁵ Shul, R.J.⁶

10
- 0001448639
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 1621
- Shul, R.J.¹ Willinson, C.G.² Bridges, M.M.³ Hah, J.⁴ Lee, J.W.⁵ Pearton, S.J.⁶ Abernathy, C.R.⁷ McKenzie, J.D.⁸ Donovan, S.M.⁹ Zhang, L.¹⁰ Lester, L.F.¹¹

11
- 0005985130
- (1999) J. Appl. Phys. , vol.86 , pp. 1
- Pearton, S.J.¹ Zolper, J.C.² Shul, R.J.³ Ren, F.⁴

12
- 0003944184
- edited by S. J. Pearton (Gordon and Breach, New York)
- (1997) GaN and Related Materials
- Nakamura, S.¹

13
- 0002815429
- (1997) Mater. Sci. Eng., B , vol.50 , pp. 82
- Kim, H.S.¹ Lee, Y.H.² Lee, J.W.³ Kim, T.I.⁴ Yeom, G.Y.⁵

14
- 0001068033
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 1478
- Lee, Y.H.¹ Kim, H.S.² Lee, J.W.³ Yoo, M.C.⁴ Kim, T.I.⁵ Yeom, G.Y.⁶

15
- 0001608744
- (1998) Mater. Res. Soc. Symp. Proc. , vol.512 , pp. 487
- Shul, R.J.¹ Ashby, C.I.H.² Willinson, C.G.³ Zhang, L.⁴ Han, J.⁵ Bridges, M.M.⁶ Pearton, S.J.⁷ Lee, J.W.⁸ Lester, L.F.⁹

16
- 0031212341
- (1997) J. Electrochem. Soc. , vol.144 , pp. 2844
- Vartuli, C.B.¹ Pearton, S.J.² Lee, J.W.³ McKenzie, J.D.⁴ Abernathy, C.R.⁵ Shul, R.J.⁶ Constantine, C.⁷ Barratt, C.⁸

17
- 0030702554
- (1997) Mater. Res. Soc. Symp. Proc. , vol.468 , pp. 355
- Shul, R.J.¹ Briggs, R.D.² Han, J.³ Pearton, S.J.⁴ Lee, J.W.⁵ Vartuli, C.B.⁶ Killeen, K.P.⁷ Lodowise, M.J.⁸

18
- 0034350343
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 2169
- Im, Y.H.¹ Park, J.S.² Hahn, Y.B.³ Nahm, K.S.⁴ Lee, Y.S.⁵ Cho, B.C.⁶ Lim, K.Y.⁷ Lee, H.J.⁸ Pearton, S.J.⁹

19
- 0003160007
- (1999) J. Vac. Sci. Technol. A , vol.17 , pp. 2209
- Tempez, A.¹ Medelci, N.² Badi, N.³ Berishev, I.⁴ Starikov, D.⁵ Bensaoula, A.⁶

20
- 0001609657
- (1996) Mater. Res. Soc. Symp. Proc. , vol.449 , pp. 745
- Eddy C.R., Jr.¹ Molnar, B.²

21
- 0029748162
- (1996) Mater. Res. Soc. Symp. Proc. , vol.449 , pp. 723
- Johnson, N.M.¹ Gotz, W.² Neugebauer, J.³ Van De Walle, C.G.⁴

22
- 0000349539
- (2000) Appl. Phys. Lett. , vol.77 , pp. 1795
- Choi, H.W.¹ Chua, S.J.² Ramam, A.³ Pan, J.S.⁴ Wee, A.T.S.⁵

23
- 0034266834
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 2491
- Basak, D.¹ Fareed, Q.² Nishino, K.³ Sakai, S.⁴

24
- 0033873390
- (2000) Semicond. Sci. Technol. , vol.15 , pp. 386
- Remashan, K.¹ Chua, S.J.² Ramam, A.³ Prakash, S.⁴ Liu, W.⁵

25
- 0034227261
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 1390
- Lee, Y.H.¹ Sung, Y.J.² Yeom, G.Y.³ Lee, J.W.⁴ Kim, T.I.⁵

26
- 0024766796
- (1989) J. Cryst. Growth , vol.98 , pp. 209
- Akasaki, I.¹ Amano, H.² Koide, Y.³ Hiramatsu, K.⁴ Sawaki, N.⁵

27
- 0000278416
- (1994) J. Appl. Phys. , vol.76 , pp. 8195
- Xiao, H.Z.¹ Lee, N.E.² Powell, R.C.³ Ma, Z.⁴ Allen, L.H.⁵ Green, J.E.⁶ Rockett, A.⁷

28
- 0000217798
- (1996) Appl. Phys. Lett. , vol.69 , pp. 2879
- Guha, S.¹ Bojarczuk, N.A.² Kisker, D.W.³

29
- 0001805595
- (1998) MRS Internet J. Nitride Semicond. Res. , vol.3 , pp. 11
- Hellman, E.S.¹

30
- 4244083530
- (1997) Phys. Rev. Lett. , vol.79 , pp. 3934
- Smith, A.R.¹ Feenstra, R.M.² Greeve, D.W.³ Neugebauer, J.⁴ Northrup, J.E.⁵

31
- 0040081289
- (1998) Appl. Phys. Lett. , vol.72 , pp. 2114
- Smith, A.R.¹ Feenstra, R.M.² Greeve, D.W.³ Shin, M.S.⁴ Skowronski, M.⁵ Neugebauer, J.⁶ Northrup, J.E.⁷

32
- 0000109696
- (1997) Phys. Rev. B , vol.56
- Rapcewicz, K.¹ Nardelli, M.B.² Bernholc, J.³

33
- 0001379773
- (1999) J. Vac. Sci. Technol. A , vol.17 , pp. 1230
- Lee, W.J.¹ Kim, H.S.² Yeom, G.Y.³ Lee, J.W.⁴ Kim, T.I.⁵

34
- 0000465857
- (1996) J. Appl. Phys. , vol.80 , pp. 6349
- Polyakov, A.Y.¹ Shin, M.² Freitas, J.A.³ Skrowronski, M.⁴ Greene, D.W.⁵ Wilson, R.G.⁶

35
- 0029640326
- (1995) Appl. Phys. Lett. , vol.67 , pp. 2188
- Suski, T.¹ Perlin, P.² Teisseyre, H.³ Leszczynski, M.⁴ Grrzegory, I.⁵ Jun, J.⁶ Bockowski, M.⁷ Porowski, S.⁸ Moustakas, T.D.⁹

36
- 0642279688
- (1996) Phys. Rev. B , vol.55 , pp. 9571
- Mattila, T.¹ Neimann, R.M.²

37
- 85010812746
- (1996) Appl. Phys. Lett. , vol.69 , pp. 503
- Neugebauer, J.¹ Van de Walle, C.G.²

38
- 0033905744
- (2000) Physica B , vol.275 , pp. 301
- Tripathy, S.¹ Soni, R.K.² Asahi, H.³ Gonda, S.⁴

39
- 0001201850
- (1999) Phys. Rev. B , vol.59 , pp. 1575
- Toth, M.¹ Fleischer, K.² Phillips, M.R.³

40
- 0141546306
- (1997) Phys. Rev. B , vol.56 , pp. 9496
- Boguslawski, P.¹ Bernholc, J.²

41
- 0001799977
- (1996) Appl. Phys. Lett. , vol.69 , pp. 233
- Boguslawski, P.¹ Briggs, E.L.² Bernholc, J.³

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