Structural and compositional study of B-C-N films produced by laser ablation of B4C targets in N2 atmosphere

Applied Surface Science

Volumn 157, Issue 3, 2000, Pages 135-144

  Laidani, N ^a   Anderle, M ^a   Canteri, R ^a   Elia, L ^b   Luches, A ^b   Martino, M ^b   Micheli, V ^a   Speranza, G ^a  

^a ITC IRST   (Italy)

^b Ist Naz Fis Della Materia U   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; DEPOSITION; EXCIMER LASERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LASER ABLATION; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SILICON; SURFACE STRUCTURE; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

BORON CARBON NITRIDE;

BORON COMPOUNDS;

EID: 0033878114     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00559-0     Document Type: Article

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