Tribological properties of r.f. PACVD amorphous B-N-C coatings

Thin Solid Films

Volumn 281-282, Issue 1-2, 1996, Pages 331-333

  Dekempeneer, E H A ^a   Meneve, J ^a   Kuypers, S ^a   Smeets, J ^a  

^a FLEMISH INSTITUTE FOR TECHNOLOGICAL RESEARCH VITO   (Belgium)

Author keywords

Amorphous materials; Coatings; Hardness; Plasma processing and deposition

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COATINGS; COMPOSITION; FILM PREPARATION; FRICTION; HARDNESS; HYDROGENATION; MECHANICAL PROPERTIES; MICROSTRUCTURE; PLASMA APPLICATIONS; TRIBOLOGY; WEAR RESISTANCE;

AMORPHOUS COATINGS; BALL ON DISC TESTING; BORON NITROGEN CARBON COATINGS; DIAMOND LIKE CARBON FILMS; PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION;

AMORPHOUS FILMS;

EID: 0030218380     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(96)08657-9     Document Type: Article

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