Detailed structure of dc glow discharges - Effects of pressure, applied voltage, and γ-coefficient

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 1031-1033

  Nanbu, K ^a   Kageyama, J ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

dc; Glow discharge; Particle simulation; Plasma

Indexed keywords

ARGON; COMPUTER SIMULATION; ELECTRIC FIELD EFFECTS; ELECTRON BEAMS; ELECTRON EMISSION; IONS; MONTE CARLO METHODS; PLASMA COLLISION PROCESSES; PLASMA DENSITY; PLASMAS; PRESSURE EFFECTS; VELOCITY;

ACCURATE COLLISION CROSS SECTIONS; APPLIED VOLTAGE; GAS PRESSURE; HIGH ENERGY BEAM ELECTRONS; MEAN ELECTRON ENERGY; PARTICLE IN CELL MONTE CARLO METHOD;

GLOW DISCHARGES;

EID: 0030172897     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00118-2     Document Type: Article

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