Integrated amorphous and polycrystalline silicon thin-film transistors in a single silicon layer

IEEE Transactions on Electron Devices

Volumn 48, Issue 4, 2001, Pages 707-714

  Pangal, Kiran ^a,b   Sturm, James C ^a,c   Wagner, Sigurd ^a,c  

^a IEEE   (United States)

^b INTEL CORPORATION   (United States)

^c Princeton University   (United States)

Author keywords

Crystallization; Hydrogen; Hydrogen plasma; Silicon; Thin film transistors (TFTs)

Indexed keywords

HYDROGEN PLASMAS;

AMORPHOUS SILICON; ANNEALING; CRYSTALLIZATION; ELECTRON MOBILITY; HYDROGEN; POLYSILICON; SEMICONDUCTING FILMS;

THIN FILM TRANSISTORS;

EID: 0035307762     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.915699     Document Type: Article

References (25)

1. Effect of plasma treatment on crystallization behavior of amorphous silicon films
2. Hydrogen plasma enhanced crystallization of hydrogenated amorphous silicon films
3. Post-deposition annealing and hydrogenation of hot-wire amorphous and microcrystalline silicon films
4. Selective crystallization of a-Si: H films on glass
5. Amorphous silicon thin-film transistors on steel foil substrates
6. Inverse staggered polycrystalline and amorphous silicon double structure thin film transistors
7. On-chip bottom-gate polycrystalline and amorphous silicon thin film transistors using excimer laser annealing
8. Hybrid amorphous and polycrystalline silicon devices for large-area electronics
9. Inverse staggered poly-Si and amorphous Si double structure TFT's for LCD panels with peripheral driver circuits integration
10. Integration of amorphous and polycrystalline silicon thin-film transistors through selective crystallization of amorphous silicon
11. α-Si: H TFT's made on polymide foil by PECVD at 150°C
12. Oxygen plasma enhanced crystallization of α-Si: H films
13. Integrated amorphous and polycrystalline silicon TFF's with a single silicon layer
14. 4
15. The role of hydrogen in silicon microcrystallization
16. Kinetics of hydrogen evolution and crystallization in hydrogenated amorphous silicon films studied by thermal analysis and Raman scattering
17. Hydrogen incorporation in amorphous silicon and processes of its release
18. Crystallization of α-Si: H on glass for active layers in thin film transistors: Effect of glass coating
19. 2
20. Hydrogen elimination and phase transitions in pulsed-gas plasma deposition of amorphous and microcrystalline silicon
21. Effect of plasma treatment on the density of defects at an amorphous Si: H-insulator interface
22. Thin film transistors in polycrystalline silicon by blanket and local source/drain hydrogen plasma-seeded crystallization
23. The effect of interface states on the amorphous silicon transistors