Integrated amorphous and polycrystalline silicon TFTs with a single silicon layer

Materials Research Society Symposium - Proceedings

Volumn 557, Issue , 1999, Pages 629-634

  Pangal, K ^a   Chen, Y ^a   Sturm, J C ^a   Wagner, S ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ANNEALING; HYDROGENATION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR PLASMAS; SUBSTRATES;

HYDROGEN PLASMA; POLYCRYSTALLINE SILICON; SINGLE SILICON LAYER;

THIN FILM TRANSISTORS;

EID: 0033300315     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-557-629     Document Type: Article

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