Hybrid amorphous and polycrystalline silicon devices for large-area electronics

Materials Research Society Symposium - Proceedings

Volumn 507, Issue , 1999, Pages 3-12

  Mei, P ^a   Boyce, J B ^a   Fork, D K ^a   Anderson, G ^a   Ho, J ^a   Lu, J ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CRYSTALLIZATION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES;

SELECTIVE AREA LASER CRYSTALLIZATION;

SEMICONDUCTING SILICON;

EID: 0032651727     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)