SCOPUS 정보 검색 플랫폼

Applied Physics A: Materials Science and Processing

Volumn 73, Issue 2, 2001, Pages 167-170

Mechanical and optical properties of CNx films with high N/C ratio

(8) Jelinek M a Kulisch, W b Delplancke Ogletree, M P c Lancok, J a Jastrabik L a Chvostova D a Popov, C b,d Bulir J a,c

a INSTITUTE OF PHYSICS (Czech Republic)

b UNIVERSITY OF KASSEL (Germany)

c UNIVERSITÉ LIBRE DE BRUXELLES (Belgium)

d CENTRAL LABORATORY OF PHOTOPROCESSES (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; COMPOSITION; ELASTIC MODULI; ELLIPSOMETRY; NITROGEN; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PULSED LASER DEPOSITION; STOICHIOMETRY; STRESSES; SUBSTRATES; VICKERS HARDNESS TESTING;

NITROGEN RICH CARBON NITRIDE FILM; VICKERS MICROHARDNESS;

CARBON NITRIDE;

EID: 0034896905 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390100849 Document Type: Article

Times cited : (13)

References (39)

1
- 20444373328
- (1989) Science , vol.245 , pp. 841
- Liu, A.Y.¹ Cohen, M.L.²

2
- 0033358299
- (1999) Thin Solid Films , vol.355-356 , pp. 406
- Popov, C.¹ Plass, M.F.² Kassing, R.³ Kulisch, W.⁴

3
- 85037415768
- (1999) Surface Engineering: Sci. Tech. , vol.1 , pp. 28
- Bulĩr̃, J.¹ Delplancke-Ogletree, M.P.²

4
- 0041710593
- (2000) Thin Solid Films , vol.366 , pp. 69
- Jelínek, M.¹ Zemek, J.² Trchová, M.³ Vorlíček, V.⁴ Lančok, J.⁵ Tomov, R.⁶ Šmečkova, M.⁷

5
- 85037420318
- in print
- (2000) Proc. 7th Int. Conf. on New Diamond Science and Technology, Hong Kong
- Jelínek, M.¹ Lančok, J.² Šimečková, M.³ Soukup, L.⁴ Peřina, V.⁵ Macková, A.⁶

6
- 0033355910
- (1999) Surf. Coat. Technol. , vol.116-119 , pp. 86
- Klett, A.¹ Freudenstein, R.² Plass, M.F.³ Kulisch, W.⁴

7
- 85037402004
- in print
- (2000) Proc. 7th Int. Conf. on New Diamond Science and Technology, Hong Kong
- Bulĩr̃, J.¹ Delplancke-Ogletree, M.P.² Lančok, J.³ Jelínek, M.⁴ Popov, C.⁵ Klett, A.⁶ Kulisch, W.⁷

8
- 0000351043
- (1996) Mat. Sci. Eng. A , vol.209 , pp. 1
- Cohen, M.L.¹

9
- 0029736292
- (1996) Mater. Chem. Phys. , vol.43 , pp. 1
- Sung, C.M.¹ Sung, M.²

10
- 0004173989
- (Noyes Publications, Park Ridge, New Jersey)
- (1993) Handbook of Carbon, Graphite, Diamond and Fullerenes
- Pierson, H.O.¹

11
- 0027150827
- (1993) Mater. Res. Soc. Symp. Proc. , vol.285 , pp. 587
- Xiong, F.¹ Chang, R.P.H.² White, C.W.³

12
- 0000127143
- (1995) J. Non-Cryst. Sol. , vol.188 , pp. 118
- Bulĩr̃, J.¹ Jelínek, M.² Vorlíček, V.³ Chvostová, D.⁴ Soukup, L.⁵

13
- 0030193613
- (1996) Thin Solid Films , vol.280 , pp. 1
- Ong, C.W.¹ Zhao, X.A.² Tsang, Y.C.³ Choy, C.L.⁴ Chan, P.W.⁵

14
- 4244010292
- (1998) Fine Mech. Opt. - JMO , vol.11-12 , pp. 328
- Fendrych, F.¹ Pajasová, L.² Wagner, T.³ Jastrabík, L.⁴ Chvostová, D.⁵ Soukup, L.⁶ Rusǔák, K.⁷

15
- 0032496506
- (1998) Thin Solid Films , vol.322 , pp. 245
- Zhao, X.A.¹ Ong, C.W.² Tsang, Y.C.³ Chan, K.F.⁴ Choy, C.L.⁵ Chan, P.W.⁶ Kwok, R.W.M.⁷

16
- 0023983419
- (1988) Solid State Commun. , vol.65 , pp. 921
- Han, H.X.¹ Feldman, B.J.²

17
- 0027541903
- (1993) Opt. Mater. , vol.2 , pp. 21
- Stenzel, O.¹ Wallendorf, T.² Petrich, R.³

18
- 0025446496
- (1990) J. Phys. D. Appl. Phys. , vol.23 , pp. 711
- Nakano, T.¹ Koike, S.² Okhi, Y.³

19
- 0015681527
- (1973) Phys. Status Solidi B , vol.60 , pp. 291
- Connell, G.A.N.¹ Lewis, A.²

20
- 0003877566
- (Springer, Heidelberg, Berlin)
- (1996) Fundamentals of Semiconductors , pp. 551
- Yu, P.Y.¹ Cardona, M.²

21
- 0031248023
- (1997) Thin Solid Films , vol.308-309 , pp. 135
- Lee, S.¹ Park, S.J.² Oh, S.³ Kim, W.M.⁴ Bae, J.H.⁵ Cheong, B.⁶ Kim, S.G.⁷

22
- 85037415123
- (1994) Proc. SPIE , vol.2235 , pp. 204
- Sobota, J.¹ Hrdina, J.² Vorlíček, V.³ Gregora, I.⁴ Široký, P.⁵ Peřina, V.⁶

23
- 0029250683
- (1995) Thin Solid Films , vol.256 , pp. 148
- Wang, X.¹ Martin, P.J.² Kinder, T.J.³

24
- 0030365343
- (1996) Czech. J. Phys. , vol.46 , pp. 863
- Jelínek, M.¹ Bulĩr̃, J.² Hrdina, J.³ Vorlíček, V.⁴ Šmečková, M.⁵ Peřina, V.⁶ Jastrabík, L.⁷

25
- 0032670087
- (1999) Diam. Relat. Mater. , vol.8 , pp. 1857
- Jelínek, M.¹ Kulisch, W.² Delplancke-Ogletree, M.P.³ Vorlíček, V.⁴ Studnička, V.⁵ Chvostová, D.⁶ Trchová, M.⁷ Sobota, J.⁸

26
- 0031249746
- (1997) Thin Solid Films , vol.308-309 , pp. 284
- Chia, R.W.J.¹ Li, E.² Sugi, S.³ Li, G.G.⁴ Zhu, H.⁵ Forouhi, A.R.⁶ Bloomer, I.⁷

27
- 4243632615
- (1998) Fine Mech. Opt. - JMO , vol.11-12 , pp. 325
- Fendrych, F.¹ Jastrabík, L.² Pajasová, L.³ Chvostová, D.⁴ Soukup, L.⁵ Rusǔák, K.⁶

28
- 0032026664
- (1998) Appl. Phys. Lett. , vol.72 , pp. 1412
- Tsubouchi, N.¹ Horino, Y.² Enders, B.³ Chayahara, A.⁴ Kinomura, A.⁵ Fujii, K.⁶

29
- 0032654602
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1039
- Kulisch, W.¹ Delplancke-Ogletree, M.P.² Bulĩr̃, J.³ Jelínek, M.⁴ Jurek, K.⁵ Zemek, J.⁶ Klimovič, J.⁷

30
- 0034516522
- (2000) Thin Solid Films , vol.377-378 , pp. 148
- Kulisch, W.¹ Popov, C.² Zambov, L.³ Bulĩr̃, J.⁴ Delplancke-Ogletree, M.P.⁵ Lančok, J.⁶ Jelínek, M.⁷

31
- 0030538517
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 56
- Sjöström, H.¹ Hultman, L.² Sundgren, J.E.³ Hainsworth, S.V.⁴ Page, T.F.⁵ Theunissen, G.S.A.M.⁶

32
- 0033311819
- (1999) Jpn. J. Appl. Phys. , vol.38
- Tajima, N.¹ Saze, H.² Sugimura, H.³ Takai, O.⁴

33
- 0031994367
- (1998) Diamond Relat. Mater. , vol.7 , pp. 417
- Fendrych, F.¹ Jastrabik, L.² Pajasova, L.³ Chvostová, D.⁴ Soukup, L.⁵ Rusǔák, K.⁶

34
- 0004408548
- (1997) Thin Solid Films , vol.292 , pp. 31
- Bulĩr̃, J.¹ Jelínek, M.² Vorlíček, V.³ Zemek, J.⁴ Peřina, V.⁵

35
- 0000425471
- (1997) J. Appl. Phys. , vol.81 , pp. 2626
- Silva, S.R.P.¹ Robertson, J.² Amaratunga, G.A.J.³ Rafferty, B.⁴ Brown, L.M.⁵ Schwan, J.⁶ Franceschini, D.F.⁷ Mariotto, G.⁸

36
- 0000266019
- (1997) Diamond Relat. Mater. , vol.6 , pp. 626
- Spaeth, C.¹ Kühn, M.² Kreissig, U.³ Richter, F.⁴

37
- 0030647936
- (1997) Thin Solid Films , vol.293 , pp. 236
- Freire F.L., Jr.¹ Franceschini, D.F.²

38
- 0000616477
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2645
- Franceschini, D.F.¹ Freire F.L., Jr.² Silva, S.R.P.³

39
- 0032621456
- (1999) Diamond Relat. Mater. , vol.8 , pp. 623
- Arora, M.K.¹ Lettington, A.H.² Waterman, D.R.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.