SCOPUS 정보 검색 플랫폼

Volumn 7, Issue 2-5, 1998, Pages 417-421

The mechanical, tribological and optical properties of CNx coatings prepared by sputtering methods

Author keywords

Carbon nitrides; Ellipsometry; Sputtering; Tribology

Indexed keywords

CARBON; ELLIPSOMETRY; OPTICAL PROPERTIES; SPUTTERING; TRIBOLOGY;

NITROGEN CONTENT;

NITRIDES;

EID: 0031994367 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/s0925-9635(97)00231-8 Document Type: Article

Times cited : (8)

References (17)

1
- 0018444910
- J.J. Cuomo, P.A. Leary, D. Yu, W. Reuter, M. Frisch, J. Vac. Sci. Technol. 16 (2) (1979) 299.
- (1979) J. Vac. Sci. Technol. , vol.16 , Issue.2 , pp. 299
- Cuomo, J.J.¹ Leary, P.A.² Yu, D.³ Reuter, W.⁴ Frisch, M.⁵

2
- 20444373328
- A.Y. Liu, M.L. Cohen, Science 245 (1989) 841.
- (1989) Science , vol.245 , pp. 841
- Liu, A.Y.¹ Cohen, M.L.²

3
- 0042059097
- A.Y. Liu, M.L. Cohen, Phys. Rev. B 41 (15) (1990) 10727.
- (1990) Phys. Rev. B , vol.41 , Issue.15 , pp. 10727
- Liu, A.Y.¹ Cohen, M.L.²

5
- 0043149692
- Mielno, Poland
- J. Hrdina, L. Jastrabik, F. Fendrych, J. Sobota, Proc. 6th Int. Summer School "Modern Plasma Surface Technology", Mielno, Poland, 1995, pp. 113-121.
- (1995) Proc. 6th Int. Summer School "Modern Plasma Surface Technology" , pp. 113-121
- Hrdina, J.¹ Jastrabik, L.² Fendrych, F.³ Sobota, J.⁴

6
- 0042036807
- V. Vorlicek, P. Siroky, J. Sobota, V. Perina, V. Zelezny, J. Hrdina, Diamond Relat. Mater. 5 (1996) 570-574.
- (1996) Diamond Relat. Mater. , vol.5 , pp. 570-574
- Vorlicek, V.¹ Siroky, P.² Sobota, J.³ Perina, V.⁴ Zelezny, V.⁵ Hrdina, J.⁶

7
- 0029734596
- L. Soukup, V. Perina, L. Jastrabik, M. Sicha, P. Pokorny, R.J. Soukup, M. Novak, J. Zemek, Surf. Coat. Technol. 78 (1996) 280-283.
- (1996) Surf. Coat. Technol. , vol.78 , pp. 280-283
- Soukup, L.¹ Perina, V.² Jastrabik, L.³ Sicha, M.⁴ Pokorny, P.⁵ Soukup, R.J.⁶ Novak, M.⁷ Zemek, J.⁸

8
- 0027678504
- No.10A
- N. Nakayama, Y. Tsuchiya, S. Tamada, K. Kosuge, S. Nagata, K. Takahiro, S. Yamaguchi, Jpn. J. Appl. Phys. 32 (1993) Pt.2, No.10A, L1465-1468.
- (1993) Jpn. J. Appl. Phys. , vol.32 , Issue.2 PT
- Nakayama, N.¹ Tsuchiya, Y.² Tamada, S.³ Kosuge, K.⁴ Nagata, S.⁵ Takahiro, K.⁶ Yamaguchi, S.⁷

9
- 0029250683
- X. Wang, P.J. Martin, T.J. Kinder, Thin Solid Films 256 (1995) 148.
- (1995) Thin Solid Films , vol.256 , pp. 148
- Wang, X.¹ Martin, P.J.² Kinder, T.J.³

10
- 0028436710
- C.A. Davis, Y. Yin, D.R. McKenzie, L.E. Hall, E. Kravtchinskaia, V. Keast, G.A.J. Amaratunga, V.S. Veerasamy, J. Non-Cryst. Solids 170 (1994) 46.
- (1994) J. Non-cryst. Solids , vol.170 , pp. 46
- Davis, C.A.¹ Yin, Y.² McKenzie, D.R.³ Hall, L.E.⁴ Kravtchinskaia, E.⁵ Keast, V.⁶ Amaratunga, G.A.J.⁷ Veerasamy, V.S.⁸

11
- 0022754765
- J. Robertson, Adv. Phys. 35 (1986) 317.
- (1986) Adv. Phys. , vol.35 , pp. 317
- Robertson, J.¹

12
- 36149020165
- E.A. Taft, H.R. Philipp, Phys. Rev. 138 (1965) 197.
- (1965) Phys. Rev. , vol.138 , pp. 197
- Taft, E.A.¹ Philipp, H.R.²

13
- 4243260877
- Ch. Gao, Y.Y. Wang, A.L. Ritter, J.R. Dennison, Phys. Rev. Lett. 62 (1989) 945.
- (1989) Phys. Rev. Lett. , vol.62 , pp. 945
- Gao, Ch.¹ Wang, Y.Y.² Ritter, A.L.³ Dennison, J.R.⁴

14
- 0025521019
- C.J. Torng, J.M. Sivertsen, J.H. Judy, C. Chang, J. Mater. Res. 5 (1990) 2490.
- (1990) J. Mater. Res. , vol.5 , pp. 2490
- Torng, C.J.¹ Sivertsen, J.M.² Judy, J.H.³ Chang, C.⁴

15
- 8644248831
- R. Grigorovici, A. Devenyi, A. Gheorghiu, A. Belu, J. Non-Cryst. Solids 8910 (1972) 793.
- (1972) J. Non-cryst. Solids , vol.8910 , pp. 793
- Grigorovici, R.¹ Devenyi, A.² Gheorghiu, A.³ Belu, A.⁴

16
- 0029734330
- S. Logothetidis, J. Petalas, S. Ves, J. Appl. Phys. 79 (1996) 1040.
- (1996) J. Appl. Phys. , vol.79 , pp. 1040
- Logothetidis, S.¹ Petalas, J.² Ves, S.³

17
- 84985574466
- J. Taue, R. Grigorovici, A. Vancu, Phys. Status Solidi 15 (1966) 627.
- (1966) Phys. Status Solidi , vol.15 , pp. 627
- Taue, J.¹ Grigorovici, R.² Vancu, A.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.