SCOPUS 정보 검색 플랫폼

Physical Review B - Condensed Matter and Materials Physics

Volumn 63, Issue 24, 2001, Pages

In situ ESR study to detect the diffusion of free H and creation of dangling bonds in hydrogenated amorphous silicon

(3) Das, U K a Yasuda, T a Yamasaki, S a

a JT RES CENTER FOR ATOM TECHNOLOGY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; SILICON;

ARTICLE; CALCULATION; COVALENT BOND; DIFFUSION COEFFICIENT; ELECTRON SPIN RESONANCE; FILM; HIGH TEMPERATURE; HYDROGENATION; MATHEMATICAL ANALYSIS; PROTON TRANSPORT; REACTION ANALYSIS; REACTION TIME; TEMPERATURE DEPENDENCE; TIME;

EID: 0034894864 PISSN: 10980121 EISSN: 1550235X Source Type: Journal
DOI: 10.1103/PhysRevB.63.245204 Document Type: Article

Times cited : (27)

References (54)

1
- 0000353360
- J I. Pankove, D E. Carlson, J E. Berkheiser, and R O. Wance, Phys. Rev. Lett.51, 2224 (1983).
- (1983) Phys. Rev. Lett. , vol.51 , pp. 2224
- Pankove, J.I.¹ Carlson, D.E.² Berkheiser, J.E.³ Wance, R.O.⁴

2
- 0000687859
- N M. Johnson, C. Herring, and D J. Chadi, Phys. Rev. Lett.56, 769 (1986).
- (1986) Phys. Rev. Lett. , vol.56 , pp. 769
- Johnson, N.M.¹ Herring, C.² Chadi, D.J.³

3
- 0023382340
- and references therein
- S J. Pearton, J W. Corbett, and T S. Shi, Appl. Phys. A: Solids Surf.43, 153 (1987), and references therein.
- (1987) Appl. Phys. A: Solids Surf. , vol.43 , pp. 153
- Pearton, S.J.¹ Corbett, J.W.² Shi, T.S.³

4
- 0030126232
- J W. Lyding, K. Hess, and I C. Kizilyalli, Appl. Phys. Lett.68, 2526 (1996).
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2526
- Lyding, J.W.¹ Hess, K.² Kizilyalli, I.C.³

5
- 0031617730
- P J. Chen and R M. Wallace, Mater. Res. Soc. Symp. Proc.513, 325 (1998).
- (1998) Mater. Res. Soc. Symp. Proc. , vol.513 , pp. 325
- Chen, P.J.¹ Wallace, R.M.²

6
- 0001644156
- C H. Seager and D S. Ginley, Appl. Phys. Lett.34, 337 (1979).
- (1979) Appl. Phys. Lett. , vol.34 , pp. 337
- Seager, C.H.¹ Ginley, D.S.²

7
- 49649137491
- W E. Spear and P G. Lecomber, J. Non-Cryst. Solids8–10, 727 (1972).
- (1972) J. Non-Cryst. Solids , vol.8-10 , pp. 727
- Spear, W.E.¹ Lecomber, P.G.²

8
- 77956394874
- J. Stuke, W. Bernig, Taylor and Francis, London, and, in, edited by, and,) p
- W. Beyer and J. Stuke, in Amorphous and Liquid Semiconductors, edited by J. Stuke and W. Bernig (Taylor and Francis, London, 1974) p. 245.
- (1974) Amorphous and Liquid Semiconductors , pp. 245
- Beyer, W.¹ Stuke, J.²

9
- 0016573648
- W E. Spear and P G. Lecomber, Solid State Commun.17, 1193 (1975).
- (1975) Solid State Commun. , vol.17 , pp. 1193
- Spear, W.E.¹ Lecomber, P.G.²

10
- 85038343502
- K. Tanaka, Kluwer, Boston, in, edited by, Chap. 4
- S. Yamasaki, in Glow Discharge Hydrogenated Amorphaus Silicon, edited by K. Tanaka (Kluwer, Boston, 1989), Chap. 4.
- (1989) Glow Discharge Hydrogenated Amorphaus Silicon
- Yamasaki, S.¹

11
- 0000805728
- J R. Abelson, Appl. Phys. A: Solids Surf.56, 493 (1993).
- (1993) Appl. Phys. A: Solids Surf. , vol.56 , pp. 493
- Abelson, J.R.¹

12
- 0033704816
- U K. Das, J K. Rath, D L. Williamson, and P. Chaudhuri, Jpn. J. Appl. Phys., Part 139, 2530 (2000).
- (2000) Jpn. J. Appl. Phys., Part 1 , vol.39 , pp. 2530
- Das, U.K.¹ Rath, J.K.² Williamson, D.L.³ Chaudhuri, P.⁴

13
- 0000696495
- I. Kaiser, N H. Nickel, W. Fuhs, and W. Pilz, Phys. Rev. B58, R1718 (1998).
- (1998) Phys. Rev. B , vol.58 , pp. R1718
- Kaiser, I.¹ Nickel, N.H.² Fuhs, W.³ Pilz, W.⁴

14
- 25744447635
- R A. Street, Phys. Rev. B43, 2454 (1991).
- (1991) Phys. Rev. B , vol.43 , pp. 2454
- Street, R.A.¹

15
- 0023399574
- K. Tanaka and A. Matsuda, Mater. Sci. Rep.2, 139 (1987).
- (1987) Mater. Sci. Rep. , vol.2 , pp. 139
- Tanaka, K.¹ Matsuda, A.²

16
- 0024822560
- I. Shimizu, J. Non-Cryst. Solids114, 145 (1989).
- (1989) J. Non-Cryst. Solids , vol.114 , pp. 145
- Shimizu, I.¹

17
- 36449005804
- H. Shirai, D. Das, J. Hanna, and I. Shimizu, Appl. Phys. Lett.59, 1096 (1991).
- (1991) Appl. Phys. Lett. , vol.59 , pp. 1096
- Shirai, H.¹ Das, D.² Hanna, J.³ Shimizu, I.⁴

18
- 0001311905
- N M. Johnson, C E. Nebel, P V. Santos, W B. Jackson, R A. Street, K S. Stevens, and J. Walker, Appl. Phys. Lett.59, 1443 (1991).
- (1991) Appl. Phys. Lett. , vol.59 , pp. 1443
- Johnson, N.M.¹ Nebel, C.E.² Santos, P.V.³ Jackson, W.B.⁴ Street, R.A.⁵ Stevens, K.S.⁶ Walker, J.⁷

19
- 35848950982
- W. Futako, K. Yoshino, C M. Fortmann, and I. Shimizu, J. Appl. Phys.85, 812 (1999).
- (1999) J. Appl. Phys. , vol.85 , pp. 812
- Futako, W.¹ Yoshino, K.² Fortmann, C.M.³ Shimizu, I.⁴

20
- 0000039928
- M. Stutzmann, W B. Jackson, and C C. Tsai, Appl. Phys. Lett.45, 1075 (1984).
- (1984) Appl. Phys. Lett. , vol.45 , pp. 1075
- Stutzmann, M.¹ Jackson, W.B.² Tsai, C.C.³

21
- 0002717941
- C. Godet and P. Roca i Cabarrocas, J. Appl. Phys.80, 97 (1996).
- (1996) J. Appl. Phys. , vol.80 , pp. 97
- Godet, C.¹ Roca i Cabarrocas, P.²

22
- 0001401004
- R. Biswas, Q. Li, B C. Pan, and Y. Yoon, Phys. Rev. B57, 2253 (1998).
- (1998) Phys. Rev. B , vol.57 , pp. 2253
- Biswas, R.¹ Li, Q.² Pan, B.C.³ Yoon, Y.⁴

23
- 0000578389
- H M. Branz, Phys. Rev. B59, 5498 (1999).
- (1999) Phys. Rev. B , vol.59 , pp. 5498
- Branz, H.M.¹

24
- 0026135814
- J B. Boyce and S E. Ready, Physica B170, 305 (1991).
- (1991) Physica B , vol.170 , pp. 305
- Boyce, J.B.¹ Ready, S.E.²

25
- 33745935178
- M H. Brodsky, M. Cardona, and J J. Cuomo, Phys. Rev. B16, 3556 (1977).
- (1977) Phys. Rev. B , vol.16 , pp. 3556
- Brodsky, M.H.¹ Cardona, M.² Cuomo, J.J.³

26
- 33744680540
- J C. Knights, G. Lucovsky, and R J. Nemanich, Philos. Mag. B37, 469 (1978).
- (1978) Philos. Mag. B , vol.37 , pp. 469
- Knights, J.C.¹ Lucovsky, G.² Nemanich, R.J.³

27
- 0000737116
- A A. Langford, M L. Fleet, B P. Nelson, W A. Langford, and N. Maley, Phys. Rev. B45, 13 367 (1992).
- (1992) Phys. Rev. B , vol.45 , pp. 13 367
- Langford, A.A.¹ Fleet, M.L.² Nelson, B.P.³ Langford, W.A.⁴ Maley, N.⁵

28
- 0031273619
- C.-M. Chiang, S M. Gates, S S. Lee, M. Kong, and S F. Bent, J. Phys. Chem. B101, 9537 (1997).
- (1997) J. Phys. Chem. B , vol.101 , pp. 9537
- M, C.¹ Gates, S.M.² Lee, S.S.³ Kong, M.⁴ Bent, S.F.⁵

29
- 0018470344
- H. Fritzsche, M. Tanielian, C C. Tsai, and P J. Gaczi, J. Appl. Phys.50, 3366 (1979).
- (1979) J. Appl. Phys. , vol.50 , pp. 3366
- Fritzsche, H.¹ Tanielian, M.² Tsai, C.C.³ Gaczi, P.J.⁴

30
- 41149125354
- W. Beyer and H. Wagner, J. Phys. (Paris), Colloq.42, C4-773 (1981).
- (1981) J. Phys. (Paris), Colloq. , vol.42 , pp. C4-C773
- Beyer, W.¹ Wagner, H.²

31
- 33846988425
- Academic, Orlando, p
- W. Beyer, Semiconductors and Semimetals Vol. 61 (Academic, Orlando, 1999), p. 165.
- (1999) Semiconductors and Semimetals Vol. 61 , pp. 165
- Beyer, W.¹

32
- 0003102725
- D E. Carlson and C W. Magee, Appl. Phys. Lett.33, 81 (1978).
- (1978) Appl. Phys. Lett. , vol.33 , pp. 81
- Carlson, D.E.¹ Magee, C.W.²

33
- 0001586690
- W B. Jackson and C C. Tsai, Phys. Rev. B45, 6564 (1992).
- (1992) Phys. Rev. B , vol.45 , pp. 6564
- Jackson, W.B.¹ Tsai, C.C.²

34
- 0030379511
- M. Hock, E. A. Schiff, S. Wagner, R. Schropp, and A. Matsuda, Materials Research Society, and, in, edited by, Pittsburgh, p
- W. Beyer and U. Zastrow, in Amorphous Silicon Technology—1996, edited by M. Hock, E. A. Schiff, S. Wagner, R. Schropp, and A. Matsuda, MRS Symposia Proc. No. 420 (Materials Research Society, Pittsburgh, 1996), p. 497.
- (1996) MRS Symposia Proc. , vol.420 , pp. 497
- Beyer, W.¹ Zastrow, U.²

35
- 0001031286
- I. An, Y M. Li, C R. Wronski, and R W. Collins, Phys. Rev. B48, 4464 (1993).
- (1993) Phys. Rev. B , vol.48 , pp. 4464
- An, I.¹ Li, Y.M.² Wronski, C.R.³ Collins, R.W.⁴

36
- 0032109123
- A. von Keudell and J R. Abelson, J. Appl. Phys.84, 489 (1998).
- (1998) J. Appl. Phys. , vol.84 , pp. 489
- von Keudell, A.¹ Abelson, J.R.²

37
- 0000228489
- S. Yamasaki, T. Umeda, J. Isoya, and K. Tanaka, Appl. Phys. Lett.70, 1137 (1997).
- (1997) Appl. Phys. Lett. , vol.70 , pp. 1137
- Yamasaki, S.¹ Umeda, T.² Isoya, J.³ Tanaka, K.⁴

38
- 18744421672
- S. Yamasaki, T. Umeda, J. Isoya, and K. Tanaka, J. Non-Cryst. Solids227–230, 83 (1998).
- (1998) J. Non-Cryst. Solids , vol.227-230 , pp. 83
- Yamasaki, S.¹ Umeda, T.² Isoya, J.³ Tanaka, K.⁴

39
- 0032591491
- M. J. Sailor et al., Materials Research Society, and, in, edited by, Pittsburgh, p
- S. Yamasaki, C. Malten, T. Umeda, J. Isoya, and K. Tanaka, in Microcrystalline and Nanocrystalline Semiconductors—1998, edited by M. J. Sailor et al., MRS Symposia No. 536 (Materials Research Society, Pittsburgh, 1999), p. 463.
- (1999) MRS Symposia , vol.536 , pp. 463
- Yamasaki, S.¹ Malten, C.² Umeda, T.³ Isoya, J.⁴ Tanaka, K.⁵

40
- 0000236841
- S. Yamasaki, U K. Das, T. Umeda, J. Isoya, and K. Tanaka, J. Non-Cryst. Solids266–269, 529 (2000).
- (2000) J. Non-Cryst. Solids , vol.266-269 , pp. 529
- Yamasaki, S.¹ Das, U.K.² Umeda, T.³ Isoya, J.⁴ Tanaka, K.⁵

41
- 0034273285
- U K. Das, T. Yasuda, and S. Yamasaki, Phys. Rev. Lett.85, 2324 (2000).
- (2000) Phys. Rev. Lett. , vol.85 , pp. 2324
- Das, U.K.¹ Yasuda, T.² Yamasaki, S.³

42
- 0001360645
- T. Umeda, S. Yamasaki, J. Isoya, and K. Tanaka, Phys. Rev. B59, 4849 (1999).
- (1999) Phys. Rev. B , vol.59 , pp. 4849
- Umeda, T.¹ Yamasaki, S.² Isoya, J.³ Tanaka, K.⁴

43
- 0000182211
- J. Robertson, J. Appl. Phys.87, 2608 (2000).
- (2000) J. Appl. Phys. , vol.87 , pp. 2608
- Robertson, J.¹

44
- 34547246031
- A. Van Wieringen and N. Warmoltz, Physica (Amsterdam)22, 849 (1956).
- (1956) Physica (Amsterdam) , vol.22 , pp. 849
- Van Wieringen, A.¹ Warmoltz, N.²

45
- 4244168842
- J. Shinar, R. Shinar, S. Mitra, and J.-Y. Kim, Phys. Rev. Lett.62, 2001 (1989).
- (1989) Phys. Rev. Lett. , vol.62 , pp. 2001
- Shinar, J.¹ Shinar, R.² Mitra, S.³ Y, J.⁴

46
- 0026138277
- W. Beyer, Physica B170, 105 (1991).
- (1991) Physica B , vol.170 , pp. 105
- Beyer, W.¹

47
- 0000615524
- B. Abeles, L. Yang, D. Leta, and C. Majkrzak, J. Non-Cryst. Solids97&98, 353 (1987).
- (1987) J. Non-Cryst. Solids , vol.97-98 , pp. 353
- Abeles, B.¹ Yang, L.² Leta, D.³ Majkrzak, C.⁴

48
- 0001600179
- H M. Branz, Phys. Rev. B60, 7725 (1999).
- (1999) Phys. Rev. B , vol.60 , pp. 7725
- Branz, H.M.¹

49
- 0001562453
- M. Nakamura, T. Ohno, K. Miyata, N. Konishi, and T. Suzuki, J. Appl. Phys.65, 3061 (1989).
- (1989) J. Appl. Phys. , vol.65 , pp. 3061
- Nakamura, M.¹ Ohno, T.² Miyata, K.³ Konishi, N.⁴ Suzuki, T.⁵

50
- 0000956950
- P V. Santos and W B. Jackson, Phys. Rev. B46, 4595 (1992).
- (1992) Phys. Rev. B , vol.46 , pp. 4595
- Santos, P.V.¹ Jackson, W.B.²

51
- 4244192504
- C. Lee, W D. Ohlsen, and P C. Taylor, Phys. Rev. B36, 2965 (1987).
- (1987) Phys. Rev. B , vol.36 , pp. 2965
- Lee, C.¹ Ohlsen, W.D.² Taylor, P.C.³

52
- 31644444264
- Y. Bar-Yam, D. Adler, and J D. Joannopoulos, Phys. Rev. Lett.57, 467 (1986).
- (1986) Phys. Rev. Lett. , vol.57 , pp. 467
- Bar-Yam, Y.¹ Adler, D.² Joannopoulos, J.D.³

53
- 3643087771
- Z E. Smith and S. Wagner, Phys. Rev. Lett.59, 688 (1987).
- (1987) Phys. Rev. Lett. , vol.59 , pp. 688
- Smith, Z.E.¹ Wagner, S.²

54
- 0000551829
- P C. Kelires and J. Tersoff, Phys. Rev. Lett.61, 562 (1988).
- (1988) Phys. Rev. Lett. , vol.61 , pp. 562
- Kelires, P.C.¹ Tersoff, J.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.