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Journal De Physique. IV : JP

Volumn 11, Issue 3, 2001, Pages

Structure and composition investigation of RPECVD SiCN and LPCVD BCN films

(8) Kosinova, M L a Fainer, N I a Rumyantsev, Yu M a Terauchi, M a Shibata, K a Satoh, F a Tanaka, M a Kuznetsov, F A a

a NIKOLAEV INSTITUTE OF INORGANIC CHEMISTRY (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

BORON COMPOUNDS; CHEMICAL BONDS; ELLIPSOMETRY; FILM GROWTH; HIGH RESOLUTION ELECTRON MICROSCOPY; INFRARED SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON COMPOUNDS; STRUCTURE (COMPOSITION); SYNCHROTRON RADIATION; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

BORON CARBONITRIDE FILMS; SILICON CARBONITRIDE FILMS;

THIN FILMS;

EID: 0034848371 PISSN: 11554339 EISSN: None Source Type: Conference Proceeding
DOI: 10.1051/jp4:20013124 Document Type: Conference Paper

Times cited : (4)

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