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Volumn 405, Issue 2-3, 1998, Pages 466-469
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The structure study of thin semiconductor and dielectric films by diffraction of synchrotron radiation
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Author keywords
[No Author keywords available]
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Indexed keywords
DIELECTRIC FILMS;
DIFFRACTOMETERS;
ELECTROMAGNETIC WAVE SCATTERING;
FILM GROWTH;
SEMICONDUCTING CADMIUM COMPOUNDS;
SEMICONDUCTING FILMS;
SEMICONDUCTING SILICON COMPOUNDS;
SEMICONDUCTOR DEVICE STRUCTURES;
SILICON NITRIDE;
SUBSTRATES;
SYNCHROTRON RADIATION;
THIN FILMS;
CADMIUM SULFIDE;
ELECTROMAGNETIC WAVE DIFFRACTION;
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EID: 0032507071
PISSN: 01689002
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-9002(97)86454-6 Document Type: Article |
Times cited : (5)
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References (17)
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