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Volumn 405, Issue 2-3, 1998, Pages 466-469

The structure study of thin semiconductor and dielectric films by diffraction of synchrotron radiation

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; DIFFRACTOMETERS; ELECTROMAGNETIC WAVE SCATTERING; FILM GROWTH; SEMICONDUCTING CADMIUM COMPOUNDS; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE STRUCTURES; SILICON NITRIDE; SUBSTRATES; SYNCHROTRON RADIATION; THIN FILMS;

EID: 0032507071     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(97)86454-6     Document Type: Article
Times cited : (5)

References (17)
  • 4
    • 0041989286 scopus 로고    scopus 로고
    • Designed and manufactured by the "Burevestnik" Research and Production Amalgamation, Leningrad
    • General-use X-ray diffractometer "DRON-4". Designed and manufactured by the "Burevestnik" Research and Production Amalgamation, Leningrad.
    • General-use X-ray Diffractometer "DRON-4"
  • 5
    • 0042990920 scopus 로고    scopus 로고
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 60, card N 03143
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 60, card N 03143.
  • 6
    • 0041989287 scopus 로고    scopus 로고
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 10, card N 454
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 10, card N 454.
  • 7
    • 0041989280 scopus 로고    scopus 로고
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 23, card N 958
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 23, card N 958.
  • 8
    • 0042990915 scopus 로고    scopus 로고
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 12, card N 174
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 12, card N 174.
  • 10
    • 0041989288 scopus 로고    scopus 로고
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 27, card N 1402
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 27, card N 1402.
  • 11
    • 0042490178 scopus 로고    scopus 로고
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 9, card N 250
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 9, card N 250.
  • 12
    • 0042990912 scopus 로고    scopus 로고
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 29, card N 1126
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 29, card N 1126.
  • 13
    • 0042990916 scopus 로고    scopus 로고
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 32, card N 389
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 32, card N 389.
  • 16
    • 0041488310 scopus 로고    scopus 로고
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 25, card N 1033
    • JCPDS Int. Centre for Diffraction Data, 1988, USA, V. 25, card N 1033.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.