Laser-induced liftoff and laser patterning of large free-standing GaN substrates

Materials Research Society Symposium - Proceedings

Volumn 617, Issue , 2000, Pages

  Ambacher, O ^a   Kelly, M K ^a   Miskys, C R ^a   Hoppel L ^a   Nebel, C ^a   Stutzmann, M ^a  

^a WALTER SCHOTTKY INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ETCHING; GALLIUM; LASER PULSES; PYROLYSIS; SILICON CARBIDE; SUBSTRATES; THICK FILMS;

LASER PATTERNING;

CRYSTAL GROWTH;

EID: 0034439781     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-617-j1.7     Document Type: Conference Paper

References (26)