New way to silicon microstructuring with electrochemical etching

Physica Status Solidi (A) Applied Research

Volumn 182, Issue 1, 2000, Pages 561-566

  Christophersen, M ^a   Merz, P ^a   Quenzer, J ^b   Carstensen, J ^a   Foll H ^a  

^a UNIVERSITY OF KIEL   (Germany)

^b FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; ELECTROLYTES; ETCHING; MORPHOLOGY; ORGANIC COMPOUNDS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; STRESSES;

ELECTROCHEMICAL ETCHING; MACROPORES; MECHANICAL STRESS; TRENCH FORMATION;

POROUS SILICON;

EID: 0034430824     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396X(200011)182:1<561::AID-PSSA561>3.0.CO;2-S     Document Type: Article

References (16)

1. J. C. VIAL and J. DERRIEN (Eds.), Porous Science and Technology, Winter School, Les Houches (France) 1994, Springer-Verlag, Berlin 1994.
2. A. G. CULLIS, L. T. CANHAM, and P. D. J. CALCOTT, J. Appl. Phys. 82, R1 (1997).
3. S. OTTOW, V. LEHMANN, and H. FÖLL, J. Electrochem. Soc. 143, 385 (1996).
4. P. KLEINMANN, J. LINNROS, and S. PETERSSON, Mater. Sci. Engng. B 69/70, 29 (2000).
5. R. ANGELUCCI, A. POGGI, L. DORI, A. TAGLIANI, G. C. CARDINALI, F. CORTICELLI, and M. MADISALDI, J. Porous Mater 7, 197 (2000).
6. K. IMAI, Solid State Electron. 24, 159 (1981).
7. F. MÜLLER, A. BIRNER, U. GÖSELE, V. LEHMANN, S. OTTOW, and H. FÖLL, J. Porous Mater. 7, 201 (2000).
8. V. LEHMANN and H. FÖLL, J. Electrochem. Soc. 137, 653 (1990).
9. V. LEHMANN and U. GRÜNING, Thin Solid Films 297, 13 (1997).
10. W. LANG, Mater. Sci. Engng. R17, 1 (1996).
11. J. CARSTENSEN, M. CHRISTOPHERSEN, and H. FÖLL, Mater. Sci. Engng. B 69/70, 23 (2000).
12. M. CHRISTOPHERSEN, J. CARSTENSEN, A. FEUERHAKE, and H. FÖLL, Mater. Sci. Engng. B 69/70, 194 (2000).
13. M. H. AL RIFAI, M. CHRISTOPHERSEN, S. OTTOW, J. CARSTENSEN, and H. FÖLL, J. Electrochem. Soc. 147, 627 (2000).
14. A. ZEITSCHEL, A. FRIEDBERGER, W. WELSER, and G. MÜLLER, Sensors and Actuators 74, 113 (1999).
15. M. CHRISTOPHERSEN, J. CARSTENSEN, and H. FÖLL, phys. stat. sol. (a) 182, 45 (2000) (this issue).
16. J. CARSTENSEN, M. CHRISTOPHERSEN, G. HASSE, and H. FÖLL, phys. stat. sol. (a) 182, 63 (2000) (this issue).