Permeated porous silicon suspended membrane as sub-ppm benzene sensor for air quality monitoring

Journal of Porous Materials

Volumn 7, Issue 1, 2000, Pages 197-200

  Angelucci, R ^a   Poggi, A ^a   Dori, L ^a   Tagliani, A ^a   Cardinali, G C ^a   Corticelli, F ^a   Marisaldi, M ^a  

^a CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AIR QUALITY; BENZENE; CHEMICAL SENSORS; MECHANICAL PERMEABILITY; MEMBRANES; MORPHOLOGY; SEMICONDUCTING TIN COMPOUNDS;

MACROPOROUS MATERIALS; TIN DIOXIDE;

POROUS SILICON;

EID: 0033895782     PISSN: 13802224     EISSN: None     Source Type: Journal    
DOI: 10.1023/a:1009638821345     Document Type: Article

References (3)

1. R. Angelucci, A. Poggi, and L. Dori et al., in Proc. E-MRS 1996 Spring Meeting-Symposium L, Strasburg, France, June 4-7, 1996, Thin Solid Films 297, 43-47 (1997).
2. R. Angelucci, A. Poggi, and C. Critelli et al., in Proc. 27th European Solid State Device Research Conference (ESSDERC), Stuttgart (D), Sept. 22-24, 1997, p. 684.
3. V. Lehmann and H. Foell, J. Electrochem. Soc. 137, 653 (1990).