Pore formation mechanisms for the Si-HF system

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volumn 69, Issue , 2000, Pages 23-28

  Carstensen, J ^a   Christophersen, M ^a   Foil, H ^a  

^a UNIVERSITY OF KIEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DISSOLUTION; ELECTRIC SPACE CHARGE; ELECTROCHEMICAL ELECTRODES; INTERFACES (MATERIALS); NUCLEATION; REACTION KINETICS; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR JUNCTIONS; SYNCHRONIZATION;

ENHANCED NUCLEATION PROBABILITIES; SELF-ORGANIZED PROCESSES; SILICON ELECTROCHEMISTRY;

SEMICONDUCTING SILICON;

EID: 0033874829     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(99)00287-1     Document Type: Article

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