Atom-by-atom analysis of microtip emitter surfaces by the scanning atom probe

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 2, 1999, Pages 608-612

  Nishikawa, O ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644450276     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590604     Document Type: Article

References (8)

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4. O. Nishikawa, T. Sekine, Y. Ohtani, K. Maeda, Y. Numada, and M. Watanabe, J. Vac. Sci. Technol. B 16, 836 (1998).
5. O. Nishikawa, K. Maeda, Y. Ohtani, M. Watanabe, K. Tanaka, T. Sekine, M. Iwatsuki, S. Aoki, J. Itoh, and K. Yamanaka (unpublished).
6. O. Nishikawa, K. Kurihara, M. Nachi, M. Konishi, and M. Wada, Rev. Sci. Instrum. 52, 810 (1981).
7. J. P. F. Sellschop, C. C. P. Madiba, and H. J. Annegarn, Nucl. Instrum. Methods 168, 529 (1980).
8. T. Nishimori, H. Sakamoto, Y. Takakuwa, and S. Kono, Diamond Films Technol. 6, 301 (1996).