On the many advantages of local-electrode atom probes

Ultramicroscopy

Volumn 62, Issue 1-2, 1996, Pages 29-42

  Kelly, Thomas F ^a   Camus, Patrick P ^a   Larson, David J ^a   Holzman, Louis M ^a   Bajikar, Sateesh S ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; ELECTRIC FIELDS; ION MICROSCOPES; IONS; MICROANALYSIS;

ATOM PROBE FIELD ION MICROSCOPE; ENERGY UNCERTAINTY; ION BEAM MASK ETCHING; LOCAL ELECTRODE ATOM PROBES; LOCAL EXTRACTION ELECTRODES; MICROTIPS;

ELECTRODES;

ARTICLE; ATOM PROBE FIELD ION MICROSCOPY; MICROSCOPY;

EID: 0029995889     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/0304-3991(95)00086-0     Document Type: Article

References (40)

1. Summary of Discussion at the First Workshop on 3D Atom Probe Analysis at the 40th International Field Emission Symposium, Nagoya, Japan, Appl. Surf. Sci. 76/77 (1994) xxi.
2. B. Deconihout, A. Bostel, P. Bas, S. Chamberland, L. Letellier, F. Danoix and D. Blavette, Appl. Surf. Sci. 76/77 (1994) 145.
3. A. Cerezo, T.G. Godfrey, J.M. Hyde, S.J. Sijbrandij and G.D.W. Smith, Appl. Surf. Sci. 76/77 (1994) 374.
4. O. Nishikawa and M. Kimoto, Appl. Surf. Sci. 76/77 (1994) 424.
5. O. Nishikawa, M. Kimoto and Y. Ishikawa, J. Vac. Sci. Technol. B 13 (1995) 599.
6. R. Smith and J.M. Walls, J. Phys. D: Appl. Phys. 1 (1978) 409.
7. E.W. Müller and S.V. Krishnaswamy, Rev. Sci. Instrum. 45 (1974) 1053.
8. S.V. Krishnaswamy and E.W. Müller, Rev. Sci. Instrum. 45 (1974) 1049.
9. S.S. Bajikar, T.F. Kelly and P.P. Camus, Appl. Surf. Sci. 94/95 (1996) 464.
10. C.A. Spindt, J. Appl. Phys. 39 (1968) 3504.
11. K.K. Chin and R.B Marcus, J. Vac. Sci. Technol. A 8 (1990) 3586.
12. L. Yun-Peng and Z. Mao-Sheng, Surf. Sci. 246 (1991) 75.
13. I. Brodie and C.A. Spindt, Adv. in Electronics and Elecron Phys. 83 (1992) 1.
14. C.A. Spindt, I. Brodie, L. Humphrey and E.R. Westerberg, J. Appl. Phys. 47 (1976) 5248.
15. C.A. Spindt, Surf. Sci. 266 (1991) 145.
16. C.A. Spindt, private communication (1994).
17. J.A. Panitz, S.B. McLane and E.W. Müller, Rev. Sci. Instrum. 40 (1969) 1321.
18. J.A. Panitz, Rev. Sci. Instrum. 44 (1973) 1034.
19. J.M. Sarrau, F. Daniox, B. Deconihout, M. Bouet, A. Menand and D. Blavette, App. Surf. Sci. 76/77 (1994) 7.
20. S.J. Sibrandij, A. Cerezo and G.D.W. Smith, App. Surf. Sci. 87/88 (1995) 414.
21. M. Huang, R.A.D. Mackenzie, T.J. Godfrey and G.D.W. Smith, J. Vac. Sci. Technol. B 12 (1994) 713.
22. T.F. Kelly, P.P. Camus, D.J. Larson, L.M. Holzman and S.S. Bajikar, U.S. Patent No. 5.440,124 (1995).
23. M.K. Miller and G.D.W. Smith, Atom Probe Microanalysis: Principles and Applications to Materials Problems (Materials Research Society, Pittsburgh, PA, 1989).
24. J.M. Sarrau, A. Bostel, C. Martin and J. Gallot, C.R. Acad. Sci. (Paris), Ser. B 283 (1976) 323.
25. D.J. Larson, P.P. Camus and T.F. Kelly, Appl. Surf. Sci. 94/95 (1996) 434.
26. D.J. Larson, P.P. Camus and T.F. Kelly, Appl. Surf. Sci. 67 (1993) 473.
27. For example, model ASG1 from Grant Applied Physics, Inc., 2011 Los Angeles Avenue, Berkeley, CA 94707.
28. For example, model 9307 from EG&G Ortec, 100 Midland Rd., Oak Ridge, TN 37831.
29. For example, model AVR-E4-C from Avtech Electrosystems, P.O. Box 265, Ogdensburg, NY 13669-0265.
30. For example, from Lennox Laser, 1 Green Glade Court. Phoenix, MD 21131.
31. S.S. Bajikar, T.F. Kelly, P.P. Camus and C.-M. Teng, Appl. Surf. Sci. 87/88 (1995) 438.
32. O. Nishikawa, private communication (1994).
33. D.W. Pohl, Rev. Sci. Instrum. 58 (1987) 54.
34. For example, model 8301, New Focus, Inc., 1275 Reamwood Avenue, Sunnyvale, CA 94089-2256.
35. F.S. Scire and E.C. Teague, Rev. Sci. Instrum. 49 (1978) 12.
36. D.J. Larson, C.-M. Teng, P.P. Camus and T.F. Kelly, Appl. Surf. Sci. 87/88 (1995) 446.
37. W. Hauffe, in: Sputtering by Particle Bombardment III, Eds. R. Behrisch and K. Wittmaack (Springer, Berlin, 1991) p. 318.
38. A.I. Melmed, R.D. Shull and C.K. Chiang, I. de Physique 49-C6 (1988) 459.
39. I. Linders, H. Niedrig and H. Kock, Nuc. Instrum. Meth. B 13 (1986) 309.
40. P.P. Camus, A.I. Melmed and I.F. Banfield, presentation at 38th Int. Field Emission Symp., Vienna, Austria, 1991.