Field ion specimen preparation from near-surface regions

Ultramicroscopy

Volumn 73, Issue 1-4, 1998, Pages 273-278

  Larson, D J ^a   Miller, M K ^a   Ulfig, R M ^b   Matyi, R J ^b   Camus, P P ^b   Kelly, T F ^b  

^a Microscopy and Microanalysis Group   (United States)

^b University of Wisconsin Madison   (United States)

Author keywords

Atom probe field ion microscopy; Ion sputtering; Specimen preparation

Indexed keywords

ELECTRIC FIELDS; ETCHING; EVAPORATION; IONS; SPECIMEN PREPARATION; SPUTTERING; SURFACES;

ATOM PROBE FIELD ION MICROSCOPY; ION BEAM MASK ETCHING;

ELECTRON MICROSCOPY;

ATOMIC FORCE MICROSCOPY; CONFERENCE PAPER; ELECTRIC FIELD; IMAGE PROCESSING; ION SELECTIVE ELECTRODE; MICROSCOPY;

EID: 0032103057     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(97)00167-8     Document Type: Conference Paper

References (17)

1. Müller E.W., Panitz J.A., McLane S.B. Rev. Sci. Instr. 39:1968;83.
2. Miller M.K., Smith G.D.W. Atom Probe Microanalysis. Principles and Applications to Materials Problems:1989;Materials Research Society, Pittsburgh, PA.
3. Melmed A.J. J. Vac. Sci. Technol. B. 9:1991;601.
4. Alexander K.B., Angelini P., Miller M.K. J. de Physique. 50-C8:1989;549.
5. Yashiro Y., Terao T. Surf. Sci. 67:1977;605.
6. Hauffe W. Behrisch R., Wittmaack K. Sputtering by Particle Bombardment III. 1991;318 Springer, Berlin.
7. Liddle J.A., Norman A., Cerezo A., Grovenor C.R.M. J. de Physique. 49-C6:1988;509.
8. Larson D.J., Teng C.-M., Camus P.P., Kelly T.F. Appl. Surf. Sci. 87/88:1995;446.
9. Kvist A., Andren H.-O., Lundin L. Appl. Surf. Sci. 94/95:1996;356.
10. Nishikawa O., Kimoto M. App. Surf. Sci. 76/77:1994;424.
11. Nishikawa O., Kimoto M., Ishikawa Y. J. Vac. Sci. Technol. B. 13:1995;599.
12. Brodie I., Spindt C.A., Iwatsuki M. Adv. Electron. Electron Phys. 83:1992;1.
13. T.F. Kelly, P.P. Camus, D.J. Larson, S.E. Riggs, Presentation at 44th IFES, 1997.
14. Wehner G.K. J. Appl. Phys. 30:1959;1762.
15. Navinsek B. Prog. Surf. Sci. 7:1976;49.
16. Stewart A.D.G., Thompson M.W. J. Mater. Sci. 4:1969;56.
17. Bulletin #293-93, Commonwealth Scientific Corp., Alexandria, VA.