Mass resolution enhancement in local-electrode atom probes: A preliminary study using field emitter arrays

Journal De Physique. IV : JP

Volumn 6, Issue 5, 1996, Pages

  Bajikar, S S ^a   Larson, D J ^a   Camus, P P ^a   Kelly, T F ^a  

^a University of Wisconsin ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; ELECTRODES; ELECTRON EMISSION; EVAPORATION; FIELD EMISSION CATHODES; IONS; MATHEMATICAL MODELS; OPTICAL RESOLVING POWER; PROBES;

EXTRACTION ELECTRODE; GATED FIELD EMITTER ARRAY; ION EVAPORATION; LOCAL ELECTRODE ATOM PROBES; MASS RESOLUTION; MASS TO CHARGE RATIO;

SILICON;

EID: 0030234256     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:1996549     Document Type: Article

References (9)

1. T. F. Kelly, P. P. Camus, D. J. Larson, L. M. Holzmann and S. S. Bajikar, Ultramicroscopy 62 (1996) 29.
2. T. F. Kelly, P. P. Camus, D. J. Larson, L. M. Holzmann and S. S. Bajikar, U.S Patent 5,440,124, (1995).
3. S. S. Bajikar, D. J. Larson, P. P. Camus and T. F. Kelly, Ultramicroscopy in press (1996).
4. O. Nishikawa and M. Kimoto, App. Surf. Sci. 76/77 (1994) 424.
5. D. J. Larson, C-M. Teng, P. P. Camus, and T. F. Kelly, Appl. Surf. Sci. 87/88 (1995) 446.
6. M. Huang, R. A. D. Mackenzie, T. J. Godfrey and G. D. W. Smith, J. Vac. Sci. Technol. B 12, (1994) 713.
7. S. S. Bajikar, Ph.D. Thesis, University of Wisconsin-Madison, Madison, WI, USA (1996) 88.
8. M. K. Miller and G. D. W. Smith, "Atom Probe Microanalysis - Principles and Applications to Materials Problems", Materials Research Society (1989).
9. C. R. M. Grovener and G. D. W. Smith, Surf. Sci. 123 (1982) L6896.