Mass resolution enhancement in local-electrode atom probes: A preliminary study using field emitter arrays

Journal De Physique. IV : JP

Volumn 6, Issue 5, 1996, Pages

  Bajikar, S S ^a   Larson, D J ^a   Camus, P P ^a   Kelly, T F ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; ELECTRODES; ELECTRON EMISSION; EVAPORATION; FIELD EMISSION CATHODES; IONS; MATHEMATICAL MODELS; OPTICAL RESOLVING POWER; PROBES;

EXTRACTION ELECTRODE; GATED FIELD EMITTER ARRAY; ION EVAPORATION; LOCAL ELECTRODE ATOM PROBES; MASS RESOLUTION; MASS TO CHARGE RATIO;

SILICON;

EID: 0030234256     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:1996549     Document Type: Article

References (9)

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3. S. S. Bajikar, D. J. Larson, P. P. Camus and T. F. Kelly, Ultramicroscopy in press (1996).
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7. S. S. Bajikar, Ph.D. Thesis, University of Wisconsin-Madison, Madison, WI, USA (1996) 88.
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