Reliability: A possible showstopper for oxide thickness scaling?

Semiconductor Science and Technology

Volumn 15, Issue 5, 2000, Pages 436-444

  Degraeve, Robin ^a   Kaczer, Ben ^a   Groeseneken, Guido ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN OF SOLIDS; ELECTRIC CURRENT MEASUREMENT; ELECTRIC POTENTIAL; LEAKAGE CURRENTS; OXIDES; RELIABILITY; ULTRATHIN FILMS;

ULTRA-THIN OXIDES;

CMOS INTEGRATED CIRCUITS;

EID: 0033752184     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/15/5/302     Document Type: Article

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